[intlvac_sputter-pcs] Problem intlvac_sputter SNF 2013-02-28 13:38:42: Etch not working

maurice at stanford.edu maurice at stanford.edu
Thu Feb 28 13:38:43 PST 2013

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Lucas reports that the etch is not working

Previous message: [intlvac_sputter-pcs] Comment intlvac_sputter SNF 2013-02-26 11:10:29: RF: Ti DC1/AC: Si (left) DC2/AC: /AlSi (right)
Next message: [intlvac_sputter-pcs] Problem intlvac_sputter SNF 2013-02-28 13:38:42: Etch not working
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