From gyama.snf at gmail.com  Thu Jul 19 11:23:56 2012
From: gyama.snf at gmail.com (Gary Yama - SNF)
Date: Thu, 19 Jul 2012 11:23:56 -0700
Subject: Fwd: Re: Intlvac_sputter Deposition Data
In-Reply-To: <4FECC56E.8000605@stanford.edu>
References: <CAFF=Xs+nYxvJKU-9wNsprJ9_rQ8NHTu6QgsPZ4bEsGZNdj6szQ@mail.gmail.com>
	<4FE9D27D.3090500@stanford.edu>
	<4FECC56E.8000605@stanford.edu>
Message-ID: <CACU65xjBVFWF6+wqZEAVg+BLU8h9RJjJ40tq73tc49PimuDPwA@mail.gmail.com>

I just received a ~1.0um AlSi wafer from Maurice for wet etch tests to see
if there is residue as we had discussed on 6/29.

May I get a community service account for intelvac sputter to do the litho
& etch tests?

I will need, YES, svgcoat, evalign, evgdev, wbmetal, drytek2 to complete
the tests.

Thanks - Gary

On Thu, Jun 28, 2012 at 1:58 PM, Ed Myers <edmyers at stanford.edu> wrote:

>  All,
>
> Here is the agenda and notes from today's meeting.
> In attendance: Jeannie, Jim H, Fabian, Andrew, Gary Y, Steve, Zhiping,
> Brett, Maurice and Ed
>
> Regards,
>
> *Intlvac_Sputter User Meeting*
>
> *June 29, 2012*****
>
> *Agenda*
>
> *1)    **Background Data*
>
> *a.     **EE412 Final Report*
>
> *b.     **Start-Up Report*
>
> *2)    **Current Usage*
>
> *a.     **Qualified Lab Members *
>
> *                                                             i.      **28
> have been qualified on Coral*
>
> *                                                           ii.      **13
> active users, of which 4 were EE410*
>
> *b.     **Lab Member Depositions*
>
> *                                                             i.      **Ai,
> Al-Si, Ni, a-Si, SiO2, Ti, TiN, Pt*
>
> *3)    **Discussion Topics*
>
> *a.     **Deposition Rate Control/Monitoring*
>
> *b.     **Surface Reflectance*
>
> *c.      **P500 Etch Rate*
>
> *d.     **Particles/Freckles in Al-Si films*
>
> *e.     **Lamp Heating*
>
> *f.       **Thick Aluminum (>1micron)*
>
> *g.     **View Port Shutter*
>
> *4)    **Action Items:*
>
> *a.     **Put in new Al-1%Si targets*
>
> *                                                             i.      **Maurice
> and Ed to run deposition*
>
> *b.     **Provide old Roughness Vs Power wafers for surface roughness*
>
> *                                                             i.      **Give
> wafers to Gary*
>
> *c.      **Etching wafers from a. in P5000 and wet etch*
>
> *                                                             i.      **
> Gary*
>
> *d.     **Paper log*
>
> *                                                             i.      **Ed
> and Maurice to develop log book.*
>
> *e.     **Find a non-paper logging solution*
>
> *                                                             i.      **Intlvac_sputter
> users*
>
> On 6/26/2012 8:17 AM, Ed Myers wrote:
>
> All,
>
> Andrew has a good suggestion.  I have reserved Allan 101 at 11am on
> Thursday, June 28th for the Intlvac User Meeting.  I will put together a
> summary of where I think we are at.  If you have a topic you want to
> discuss please send me an email so I can make sure it is brought up.
>
> Regards,
> Ed
>
> -------- Original Message --------  Subject: Re: Intlvac_sputter
> Deposition Data  Date: Mon, 25 Jun 2012 17:34:03 -0700  From: Andrew
> Graham <grahamab at snf.stanford.edu> <grahamab at snf.stanford.edu>  To: Ed
> Myers <edmyers at stanford.edu> <edmyers at stanford.edu>  CC:
> fpurkl at snf.stanford.edu, gyama at snf.stanford.edu, jasmine at snf.stanfor.edu,
> maurice stevens <maurice at stanford.edu> <maurice at stanford.edu>
>
> Hi Ed,
>
> Maybe we can have some sort of Intlvac user meeting (or previous Gryphon
> users) to discuss the tool and its performance.  As of right now, there are
> several users that have decided, in the interest of research actually
> happening, it's simpler to send wafers out for thick aluminum (1-2um)
> rather than spend hours and hours trying to characterize recipes that we
> were told would be available before Gryphon was removed from the SNF (and
> having little luck so far in the case of Fabian's results).
>
> Andrew
>
> On Mon, Jun 25, 2012 at 4:27 PM, Ed Myers <edmyers at stanford.edu> wrote:
>
>> All,
>>
>> I see the system is getting more use so we should have a lot of
>> information on your depositions.  When I look at the values entered in to
>> Coral, all I see are hopeful values, no actual data.  Is anyone making
>> measurements on their deposited film thickness?  I see some people have
>> been changing there deposition times, but I can't see why.  I was really
>> hoping we would be developing a community of proactive lab members on this
>> tool, but it doesn't seem to be.  This also means no one is qualifying
>> themselves to become a lab member who will be able to change targets.
>>
>> Regards,
>> Ed
>>
>
>
>
>
>
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From edmyers at stanford.edu  Fri Jul 27 07:48:39 2012
From: edmyers at stanford.edu (Ed Myers)
Date: Fri, 27 Jul 2012 07:48:39 -0700
Subject: Al-1%Si Targets
Message-ID: <5012AA47.8060205@stanford.edu>

All,

I have not seen anyone comment on the remaining life of the Al-1%Si 
targets.  Looking at them while helping a new lab member, I think they 
are almost depleted.  Remember running the cathodes beyond their usable 
life is a disqualification.  Running through the target material into 
the magenets below is not a good thing and could lead to your group 
purchasing the SNF a new cathode (believe me the targets are much more 
affordable).

I will put together new Al-1%Si.  Since they are new targets the 
deposition rate will be different from the old target.  Looking at some 
of the Coral entries, I didn't see any actual deposition rates, so we 
still do not have any idea of how the deposition rate changes over the 
life of the target.

Ed


From xzhuan1 at gmail.com  Fri Jul 27 09:09:52 2012
From: xzhuan1 at gmail.com (Steve Zhuang)
Date: Fri, 27 Jul 2012 09:09:52 -0700
Subject: Al-1%Si Targets
In-Reply-To: <5012AA47.8060205@stanford.edu>
References: <5012AA47.8060205@stanford.edu>
Message-ID: <DA26F92E-824C-4719-B5D7-750AA0F2BEA9@gmail.com>

Hi Ed,

I plan to do a deposition of AlSi today. I did not realize the targets are about to deplete. Can you please change them for me?

Thanks,

Steve


On Jul 27, 2012, at 7:48 AM, Ed Myers <edmyers at stanford.edu> wrote:

> All,
> 
> I have not seen anyone comment on the remaining life of the Al-1%Si targets.  Looking at them while helping a new lab member, I think they are almost depleted.  Remember running the cathodes beyond their usable life is a disqualification.  Running through the target material into the magenets below is not a good thing and could lead to your group purchasing the SNF a new cathode (believe me the targets are much more affordable).
> 
> I will put together new Al-1%Si.  Since they are new targets the deposition rate will be different from the old target.  Looking at some of the Coral entries, I didn't see any actual deposition rates, so we still do not have any idea of how the deposition rate changes over the life of the target.
> 
> Ed


From edmyers at stanford.edu  Fri Jul 27 09:15:04 2012
From: edmyers at stanford.edu (Ed Myers)
Date: Fri, 27 Jul 2012 09:15:04 -0700
Subject: Al-1%Si Targets
In-Reply-To: <DA26F92E-824C-4719-B5D7-750AA0F2BEA9@gmail.com>
References: <5012AA47.8060205@stanford.edu> <DA26F92E-824C-4719-B5D7-750AA0F2BEA9@gmail.com>
Message-ID: <5012BE88.6010804@stanford.edu>

All,

I opened up the chamber this morning.  I think we still have some life 
left in the Al-1%Si targets.  The Al-1%Si targets are 0.5" thick, so use 
this as your base for deciding the life of the target.  Please note, not 
all targets are this thick.  For example the Si targets and Co, Ni are 
only 0.125" thick.

I could only find 1 more Al-1%Si targets.  I don't know where the other 
one went.  I do have pure Al and Al-2%Si immediately available.

Regards,
Ed

On 7/27/2012 9:09 AM, Steve Zhuang wrote:
> Hi Ed,
>
> I plan to do a deposition of AlSi today. I did not realize the targets are about to deplete. Can you please change them for me?
>
> Thanks,
>
> Steve
>
>
> On Jul 27, 2012, at 7:48 AM, Ed Myers <edmyers at stanford.edu> wrote:
>
>> All,
>>
>> I have not seen anyone comment on the remaining life of the Al-1%Si targets.  Looking at them while helping a new lab member, I think they are almost depleted.  Remember running the cathodes beyond their usable life is a disqualification.  Running through the target material into the magenets below is not a good thing and could lead to your group purchasing the SNF a new cathode (believe me the targets are much more affordable).
>>
>> I will put together new Al-1%Si.  Since they are new targets the deposition rate will be different from the old target.  Looking at some of the Coral entries, I didn't see any actual deposition rates, so we still do not have any idea of how the deposition rate changes over the life of the target.
>>
>> Ed



From xzhuan1 at gmail.com  Fri Jul 27 10:10:03 2012
From: xzhuan1 at gmail.com (Steve Zhuang)
Date: Fri, 27 Jul 2012 10:10:03 -0700
Subject: Al-1%Si Targets
In-Reply-To: <5012BE88.6010804@stanford.edu>
References: <5012AA47.8060205@stanford.edu> <DA26F92E-824C-4719-B5D7-750AA0F2BEA9@gmail.com> <5012BE88.6010804@stanford.edu>
Message-ID: <6A70D779-E2FD-485F-AFBC-02D8D75B57FF@gmail.com>

Hi Ed,

Thanks for the update. Can you please put in the pure Al targets for me?

BR,

Steve

On Jul 27, 2012, at 9:15 AM, Ed Myers <edmyers at stanford.edu> wrote:

> All,
> 
> I opened up the chamber this morning.  I think we still have some life left in the Al-1%Si targets.  The Al-1%Si targets are 0.5" thick, so use this as your base for deciding the life of the target.  Please note, not all targets are this thick.  For example the Si targets and Co, Ni are only 0.125" thick.
> 
> I could only find 1 more Al-1%Si targets.  I don't know where the other one went.  I do have pure Al and Al-2%Si immediately available.
> 
> Regards,
> Ed
> 
> On 7/27/2012 9:09 AM, Steve Zhuang wrote:
>> Hi Ed,
>> 
>> I plan to do a deposition of AlSi today. I did not realize the targets are about to deplete. Can you please change them for me?
>> 
>> Thanks,
>> 
>> Steve
>> 
>> 
>> On Jul 27, 2012, at 7:48 AM, Ed Myers <edmyers at stanford.edu> wrote:
>> 
>>> All,
>>> 
>>> I have not seen anyone comment on the remaining life of the Al-1%Si targets.  Looking at them while helping a new lab member, I think they are almost depleted.  Remember running the cathodes beyond their usable life is a disqualification.  Running through the target material into the magenets below is not a good thing and could lead to your group purchasing the SNF a new cathode (believe me the targets are much more affordable).
>>> 
>>> I will put together new Al-1%Si.  Since they are new targets the deposition rate will be different from the old target.  Looking at some of the Coral entries, I didn't see any actual deposition rates, so we still do not have any idea of how the deposition rate changes over the life of the target.
>>> 
>>> Ed
>