From edmyers at stanford.edu  Thu May 24 13:20:57 2012
From: edmyers at stanford.edu (Ed Myers)
Date: Thu, 24 May 2012 13:20:57 -0700
Subject: Intlvac_Sputter Targets
Message-ID: <4FBE9829.2060909@stanford.edu>

All,

I plan on leaving in the TiO2 targets until Friday afternoon.  The 
system will be switched back to Al-Si and Ti for the weekend.

Regards,
Ed


From ylyang at stanford.edu  Thu May 24 13:32:17 2012
From: ylyang at stanford.edu (Yongliang Yang)
Date: Thu, 24 May 2012 13:32:17 -0700 (PDT)
Subject: Intlvac_Sputter Targets
In-Reply-To: <4FBE9829.2060909@stanford.edu>
Message-ID: <84499201.15929828.1337891537788.JavaMail.root@zm04.stanford.edu>

Hi, Ed,

I would like to sputter 0.5um Al(100%) on my wafers this weekend or earlier next week. I notice no people make reservation. Could you switch the target to Al(100%).

Best,
Yongliang

----- Original Message -----
From: "Ed Myers" <edmyers at stanford.edu>
To: "intlvac sputter" <intlvac_sputter at snf.stanford.edu>
Sent: Thursday, May 24, 2012 1:20:57 PM
Subject: Intlvac_Sputter Targets

All,

I plan on leaving in the TiO2 targets until Friday afternoon.  The 
system will be switched back to Al-Si and Ti for the weekend.

Regards,
Ed


From edmyers at stanford.edu  Tue May 29 14:02:03 2012
From: edmyers at stanford.edu (Ed Myers)
Date: Tue, 29 May 2012 14:02:03 -0700
Subject: Target Changes
Message-ID: <4FC5394B.5030302@stanford.edu>

All,

I will be changing the targets in the Intlvac_sputter Wednesday morning 
(5/30).  At the request of two lab members I will configure the system 
as follows.

RF: Ti
AC/DC: Pure Al

Regards,
Ed