From sminne at snf.stanford.edu Mon Dec 4 03:22:14 2000 From: sminne at snf.stanford.edu (sminne at snf.stanford.edu) Date: Dec 4, 2000 3:22:14 PM Subject: Problem karlsuss: Minor Problem Message-ID: When light housing moves over wafer, there is a slight hesitation and jerking motion. Steve From franklin at snf.stanford.edu Tue Dec 5 08:14:58 2000 From: franklin at snf.stanford.edu (franklin at snf.stanford.edu) Date: Dec 5, 2000 8:14:58 PM Subject: Problem karlsuss: loss of wafer vac after load Message-ID: After loading my wafer, and then the machine tries to do WEC it gives the message loss of wafer vac along with a hissing noise. If I ignore this message I just get really crappy litho lines. I did notice that if as you are sliding the wafer tray into the machine during load and press down on it a little after finishing the load, the machine has no trouble getting a proper vac. This isn't a good way to run the machine but it might help you figure out what the problem might be. nate From martinez at snf.stanford.edu Thu Dec 7 07:34:44 2000 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Dec 7, 2000 7:34:44 AM Subject: Problem karlsuss: loss of wafer vac after load Message-ID: set up wec ref. ok to use From amycc at snf.stanford.edu Mon Dec 11 03:15:18 2000 From: amycc at snf.stanford.edu (amycc at snf.stanford.edu) Date: Dec 11, 2000 3:15:18 PM Subject: Problem karlsuss: drops mask Message-ID: Duing backside alignment, when the GRAB IMAGE button is hit, a warning "current overloading" occurred and then mask vaccum was lost. From amycc at snf.stanford.edu Mon Dec 11 03:54:17 2000 From: amycc at snf.stanford.edu (amycc at snf.stanford.edu) Date: Dec 11, 2000 3:54:17 PM Subject: Problem karlsuss: backside alignment Message-ID: the machined behave after dropping mask two times; mahnaz reset the machine and it was okay after resetting. From ukris at snf.stanford.edu Wed Dec 13 01:45:04 2000 From: ukris at snf.stanford.edu (ukris at snf.stanford.edu) Date: Dec 13, 2000 1:45:04 PM Subject: Problem karlsuss: Bottom substrate left focus not working Message-ID: From pzwahlen at snf.stanford.edu Thu Dec 14 01:07:08 2000 From: pzwahlen at snf.stanford.edu (pzwahlen at snf.stanford.edu) Date: Dec 14, 2000 1:07:08 AM Subject: Problem karlsuss 2000-12-14 01:07:07: Vacuum line pops out Message-ID: After every single wafer, the vacuum line pops out. Need probably just some tie wrapping around the hose. From ukris at snf.stanford.edu Fri Dec 15 04:33:12 2000 From: ukris at snf.stanford.edu (ukris at snf.stanford.edu) Date: Dec 15, 2000 4:33:12 PM Subject: Problem karlsuss 2000-12-15 16:33:10: Chuck out of range error Message-ID: I got this error on my yaxis alignment after moving the chuck less than a mm. My wafer and mask are well centered when I started. I did the same alignment (same mask) a few days ago with absolutely no problem. Looks like the micrometer limit switch needs adjustment badly! Please let me know when you troubleshoot this problem. From jac at snf.stanford.edu Sun Dec 17 12:14:25 2000 From: jac at snf.stanford.edu (jac at snf.stanford.edu) Date: Dec 17, 2000 12:14:25 PM Subject: Problem karlsuss 2000-12-17 12:14:24: bsa mic right mag level Message-ID: the backside right camera eye does not change between low and high magnification when switch is flipped. jac