Problem karlsuss 2000-12-15 16:33:10: Chuck out of range error

ukris at snf.stanford.edu ukris at snf.stanford.edu
Fri Dec 15 04:33:12 PST 2000


I got this error on my yaxis alignment after moving the chuck less than a mm. My wafer and mask are well centered when I started. I did the same alignment (same mask) a few days ago with absolutely no problem. Looks like the micrometer limit switch needs adjustment badly! Please let me know when you troubleshoot this problem. 




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