From mbartsch at snf.stanford.edu Mon Dec 3 04:50:40 2001 From: mbartsch at snf.stanford.edu (mbartsch at snf.stanford.edu) Date: Dec 3, 2001 4:50:40 PM Subject: Problem karlsuss 2001-12-03 16:50:39: WEC Failure...exposure nonuniform Message-ID: I think the KS is no longer doing its wec routine correctly. Wfares are overexposed on one side and underexposed on the other... From vilanova at snf.stanford.edu Tue Dec 4 10:54:28 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Dec 4, 2001 10:54:28 AM Subject: Problem karlsuss 2001-12-03 16:50:39: WEC Failure...exposure nonuniform Message-ID: WE Couldnt find nothing wrong to the exposure. working ok, ready to use From latta at snf.stanford.edu Tue Dec 4 04:03:22 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Dec 4, 2001 4:03:22 PM Subject: Problem karlsuss 2001-12-04 16:03:20: WEC off- Message-ID: One side of wafer is over exposed while the other side is fine. From martinez at snf.stanford.edu Wed Dec 5 08:28:58 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Dec 5, 2001 8:28:58 AM Subject: Shutdown karlsuss 2001-12-05 08:28:56: exposure problem Message-ID: From vilanova at snf.stanford.edu Wed Dec 5 01:31:09 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Dec 5, 2001 1:31:09 PM Subject: Problem karlsuss 2001-12-04 16:03:20: WEC off- Message-ID: Set up grab Z position, Replaced lamp, cleaned ellipsoidal Mirror , tested it, exposure good , ready to use. From vilanova at snf.stanford.edu Wed Dec 5 01:31:41 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Dec 5, 2001 1:31:41 PM Subject: Shutdown karlsuss 2001-12-05 08:28:56: exposure problem Message-ID: replaced lamp, cleaned ellipsoidal mirror , tested it working ok ready to use From zappe at snf.stanford.edu Mon Dec 10 05:48:55 2001 From: zappe at snf.stanford.edu (zappe at snf.stanford.edu) Date: Dec 10, 2001 5:48:55 PM Subject: Problem karlsuss 2001-12-10 17:48:54: bad grabbed image quality Message-ID: during backside alignment image looks like poorly digitized - alignment almost impossible From vilanova at snf.stanford.edu Tue Dec 11 08:39:02 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Dec 11, 2001 8:39:02 AM Subject: Problem karlsuss 2001-12-10 17:48:54: bad grabbed image quality Message-ID: I have checked & tested grab Image Problem and I couldnt repeat the problem , We'll have to keep an eye on it. ok to use From wliu at snf.stanford.edu Tue Dec 11 06:56:02 2001 From: wliu at snf.stanford.edu (wliu at snf.stanford.edu) Date: Dec 11, 2001 6:56:02 PM Subject: Problem karlsuss 2001-12-11 18:56:01: overcurrent problem Message-ID: From martinez at snf.stanford.edu Thu Dec 13 02:11:47 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Dec 13, 2001 2:11:47 PM Subject: Problem karlsuss 2001-12-11 18:56:01: overcurrent problem Message-ID: initialized wec and set up grab z pos. From szou at snf.stanford.edu Thu Dec 13 04:19:06 2001 From: szou at snf.stanford.edu (szou at snf.stanford.edu) Date: Dec 13, 2001 4:19:06 PM Subject: Problem karlsuss 2001-12-13 16:19:04: Backside microscope is not working Message-ID: The one on the right. From martinez at snf.stanford.edu Fri Dec 14 07:45:50 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Dec 14, 2001 7:45:50 AM Subject: Problem karlsuss 2001-12-13 16:19:04: Backside microscope is not working Message-ID: tested left & right bsa system. all looks good. ready for use. From flannery at snf.stanford.edu Sat Dec 15 03:38:55 2001 From: flannery at snf.stanford.edu (flannery at snf.stanford.edu) Date: Dec 15, 2001 3:38:55 PM Subject: Problem karlsuss 2001-12-15 15:38:54: Won't register load frame in. Message-ID: I did two wafers without problem. Then it refused to acknowledge that I had pushed in the load frame. I couldn't get past "Hit enter to confirm." I'd shut it down but then I'd probably get crucified. From flannery at snf.stanford.edu Sat Dec 15 04:46:08 2001 From: flannery at snf.stanford.edu (flannery at snf.stanford.edu) Date: Dec 15, 2001 4:46:08 PM Subject: Shutdown karlsuss 2001-12-15 16:46:07: Repeat of Problem Message-ID: Second user tried loading wafers. Did not work. Decided to shut down to keep people from wasting their time. From martinez at snf.stanford.edu Mon Dec 17 02:33:02 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Dec 17, 2001 2:33:02 PM Subject: Shutdown karlsuss 2001-12-15 16:46:07: Repeat of Problem Message-ID: reseated z motor ribbon cable connector, cycled wafers From martinez at snf.stanford.edu Mon Dec 17 02:33:24 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Dec 17, 2001 2:33:24 PM Subject: Problem karlsuss 2001-12-15 15:38:54: Won't register load frame in. Message-ID: reseated z motor ribbon cable connector