Problem karlsuss 2001-12-04 16:03:20: WEC off-
latta at snf.stanford.edu
latta at snf.stanford.edu
Tue Dec 4 04:03:22 PST 2001
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Problem karlsuss 2001-12-03 16:50:39: WEC Failure...exposure nonuniform
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Problem karlsuss 2001-12-04 16:03:20: WEC off-
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One side of wafer is over exposed while the other side is fine.
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Problem karlsuss 2001-12-03 16:50:39: WEC Failure...exposure nonuniform
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Problem karlsuss 2001-12-04 16:03:20: WEC off-
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