From lindaw at snf.stanford.edu Sat Feb 3 06:18:43 2001 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Feb 3, 2001 6:18:43 PM Subject: Problem karlsuss 2001-02-03 18:18:42: loss of wafer vac & gap distance variable Message-ID: every wafer got a loss of wafer vac at wec, but seemed to be held to the chuck just fine during alignment. The gap between the wafer and the mask was variable. sometimes it was much greater than the setting of 40um, and sometimes it was just fine. ??? From martinez at snf.stanford.edu Mon Feb 5 08:11:46 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Feb 5, 2001 8:11:46 AM Subject: Problem karlsuss 2001-02-03 18:18:42: loss of wafer vac & gap distance variable Message-ID: set up grab z position, cycled wafers. ready for use. From lindaw at snf.stanford.edu Wed Feb 7 09:23:45 2001 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Feb 7, 2001 9:23:45 AM Subject: Problem karlsuss 2001-02-07 09:23:44: WEC gapping all screwed up Message-ID: display says my wafer in hard contact, when in fact it is about 50um away. Worked fine for first few wafers, then just suddenly crapped out. Tried running some test wafers through in soft and hard contact, hoping that cycling through the exposure program might help. It did not. From vilanova at snf.stanford.edu Wed Feb 7 10:55:40 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Feb 7, 2001 10:55:40 AM Subject: Problem karlsuss 2001-02-07 09:23:44: WEC gapping all screwed up Message-ID: Restored Ggrab Z position From ssinha at snf.stanford.edu Wed Feb 7 12:42:43 2001 From: ssinha at snf.stanford.edu (ssinha at snf.stanford.edu) Date: Feb 7, 2001 12:42:43 PM Subject: Comment karlsuss 2001-02-07 12:42:42: Message-ID: The KS gives an overcurrent message, and then asks for a restart. Please look into it. Thanks From vilanova at snf.stanford.edu Wed Feb 7 02:23:39 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Feb 7, 2001 2:23:39 PM Subject: Comment karlsuss 2001-02-07 14:23:38: Message-ID: Unable to restore Grab Z position , Karlsuss Service Tech has been called. From vilanova at snf.stanford.edu Wed Feb 7 02:26:24 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Feb 7, 2001 2:26:24 PM Subject: Problem karlsuss 2001-02-07 14:26:23: Unable To Restore Grab Z position Message-ID: Unable To restore Grab Z position . KArlsuss tech has been Called. From storment at snf.stanford.edu Wed Feb 7 08:08:25 2001 From: storment at snf.stanford.edu (storment at snf.stanford.edu) Date: Feb 7, 2001 8:08:25 PM Subject: Shutdown karlsuss 2001-02-07 20:08:24: Message-ID: wafer doesn't come up into contact during WEC I get loss of wafer vacuum This sounds a lot like someone turned off the system again This kind of misuse has to stop I cannot get my work done! From mahnaz at snf.stanford.edu Mon Feb 12 02:53:13 2001 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Feb 12, 2001 2:53:13 PM Subject: Shutdown karlsuss 2001-02-07 20:08:24: up Message-ID: sensor is adjusted by KS eng. From mahnaz at snf.stanford.edu Mon Feb 12 02:53:51 2001 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Feb 12, 2001 2:53:51 PM Subject: Problem karlsuss 2001-02-07 14:26:23: Unable To Restore Grab Z position Message-ID: KS eng. adjusted the sensor. From dcchu at snf.stanford.edu Mon Feb 12 06:11:01 2001 From: dcchu at snf.stanford.edu (dcchu at snf.stanford.edu) Date: Feb 12, 2001 6:11:01 PM Subject: Problem karlsuss 2001-02-12 18:11:00: Message-ID: drop mask. From martinez at snf.stanford.edu Tue Feb 13 10:17:55 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Feb 13, 2001 10:17:55 AM Subject: Problem karlsuss 2001-02-12 18:11:00: karl suss is up Message-ID: replaced CPU PCB. tested, ready for use From yjlin at snf.stanford.edu Tue Feb 13 06:32:15 2001 From: yjlin at snf.stanford.edu (yjlin at snf.stanford.edu) Date: Feb 13, 2001 6:32:15 PM Subject: Problem karlsuss 2001-02-13 18:32:14: loss of mask vacuum Message-ID: This happens to the 4-inch mask. Vacuum cannot be turned on when the hose is connected, I have to disconnect it, turn on vacuum then put the hose back. But after the mask is locked, the vacuum is lost again. From vilanova at snf.stanford.edu Wed Feb 14 08:53:00 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Feb 14, 2001 8:53:00 AM Subject: Problem karlsuss 2001-02-13 18:32:14: loss of mask vacuum Message-ID: System checked , No vacuum Problem , Ok to use From hansen at snf.stanford.edu Wed Feb 14 02:32:30 2001 From: hansen at snf.stanford.edu (hansen at snf.stanford.edu) Date: Feb 14, 2001 2:32:30 PM Subject: Problem karlsuss 2001-02-14 14:32:28: WEC not leveling wafer properly Message-ID: The WEC is not leveling the wafer properly. Mahnaz advised that the equipment not be shutdown for user with large feature sizes. However, those with small features will presumably have proximity exposure on one side. From ssinha at snf.stanford.edu Fri Feb 16 02:20:42 2001 From: ssinha at snf.stanford.edu (ssinha at snf.stanford.edu) Date: Feb 16, 2001 2:20:42 PM Subject: Comment karlsuss 2001-02-16 14:20:41: Message-ID: Microscope objectives not moving. From yangxu at snf.stanford.edu Mon Feb 19 04:34:21 2001 From: yangxu at snf.stanford.edu (yangxu at snf.stanford.edu) Date: Feb 19, 2001 4:34:21 AM Subject: Problem karlsuss 2001-02-19 04:34:19: WEC not working properly for 2um lines Message-ID: exposure was good for 2um lines on the upper half of the 4 inch wafer, it didn't work for the lower half of the wafer From txx at snf.stanford.edu Wed Feb 21 06:16:59 2001 From: txx at snf.stanford.edu (txx at snf.stanford.edu) Date: Feb 21, 2001 6:16:59 PM Subject: Problem karlsuss 2001-02-21 18:16:58: Message-ID: Karl suss person did some work and left without test. He said he would come back tomorrow. Right now the aligner can not work. The message is " Overcurrent" From lindaw at snf.stanford.edu Thu Feb 22 01:08:15 2001 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Feb 22, 2001 1:08:15 PM Subject: Comment karlsuss 2001-02-22 13:08:15: WEC & backside Message-ID: Kyle from Karl Suss just left. He said the WEC should work fine now and that there were some loose set screws and that he tightened everything up. He also said that the optics for the backside capability should be in next week, but he will be in germany and italy the next two weeks, so they won't get put in until he comes back. Bummer!! From martinez at snf.stanford.edu Thu Feb 22 01:39:33 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Feb 22, 2001 1:39:33 PM Subject: Problem karlsuss 2001-02-21 18:16:58: clear prob Message-ID: wec pm completed. ready for use. From martinez at snf.stanford.edu Thu Feb 22 01:39:53 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Feb 22, 2001 1:39:53 PM Subject: Problem karlsuss 2001-02-19 04:34:19: klear prob Message-ID: From martinez at snf.stanford.edu Thu Feb 22 01:40:08 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Feb 22, 2001 1:40:08 PM Subject: Problem karlsuss 2001-02-14 14:32:28: cleer prob Message-ID: From pzwahlen at snf.stanford.edu Fri Feb 23 09:39:20 2001 From: pzwahlen at snf.stanford.edu (pzwahlen at snf.stanford.edu) Date: Feb 23, 2001 9:39:20 AM Subject: Problem karlsuss 2001-02-23 09:39:18: BSA microscope is not working Message-ID: From park at snf.stanford.edu Sat Feb 24 04:49:35 2001 From: park at snf.stanford.edu (park at snf.stanford.edu) Date: Feb 24, 2001 4:49:35 PM Subject: Problem karlsuss 2001-02-24 16:49:33: Karlsuss "overcurrent" problem Message-ID: When I increase the gap distance after unloading the sample. Somehow, I can not select the right program and every gap and exposure time become 30000 seomwhere. And then I choose one of them my mask drop and machine said "OVERCURRENT". And then never come back. From pruitt at snf.stanford.edu Sun Feb 25 03:08:37 2001 From: pruitt at snf.stanford.edu (pruitt at snf.stanford.edu) Date: Feb 25, 2001 3:08:37 PM Subject: Shutdown karlsuss 2001-02-25 15:08:36: shutdown--Suss will not initialize Message-ID: same as reported by park, overcurrent and Suss will *not* intialize or do anything. putting it on shutdown to save users a trip who may check remote coral for status... From mahnaz at snf.stanford.edu Mon Feb 26 09:23:06 2001 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Feb 26, 2001 9:23:06 AM Subject: Shutdown karlsuss 2001-02-25 15:08:36: shutdown--Suss will not initialize Message-ID: Mario checked and reset the system. From mahnaz at snf.stanford.edu Mon Feb 26 09:23:15 2001 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Feb 26, 2001 9:23:15 AM Subject: Problem karlsuss 2001-02-24 16:49:33: Karlsuss "overcurrent" problem Message-ID: npf From mahnaz at snf.stanford.edu Mon Feb 26 09:23:21 2001 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Feb 26, 2001 9:23:21 AM Subject: Problem karlsuss 2001-02-23 09:39:18: BSA microscope is not working Message-ID: From pruitt at snf.stanford.edu Mon Feb 26 10:32:22 2001 From: pruitt at snf.stanford.edu (pruitt at snf.stanford.edu) Date: Feb 26, 2001 10:32:22 PM Subject: Problem karlsuss 2001-02-26 22:32:20: loss of wafer vac/ poor focus Message-ID: loss of wafer vac on wafer load (again) no focus with topside focus pots, only manual know works From vilanova at snf.stanford.edu Tue Feb 27 08:17:54 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Feb 27, 2001 8:17:54 AM Subject: Problem karlsuss 2001-02-26 22:32:20: Karlsuss Reset it Message-ID: Karlsuss reset it , tested , no Problem Found , Ok to use From pzwahlen at snf.stanford.edu Tue Feb 27 09:24:19 2001 From: pzwahlen at snf.stanford.edu (pzwahlen at snf.stanford.edu) Date: Feb 27, 2001 9:24:19 PM Subject: Problem karlsuss 2001-02-27 21:24:17: Bad focus with topside alignment Message-ID: Left side of the microscope goes out of focus once we switch from mask to wafer alignment From vilanova at snf.stanford.edu Wed Feb 28 09:24:30 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Feb 28, 2001 9:24:30 AM Subject: Comment karlsuss 2001-02-28 09:24:30: Focus Problem Message-ID: I've reset the Karlsuss one more time, Apparently we are experiencing that same problem on and off,I wiil leave it under Yellow light just in case it happens again but it's working ok now. Ready for Use. From sjlee at snf.stanford.edu Wed Feb 28 12:50:33 2001 From: sjlee at snf.stanford.edu (sjlee at snf.stanford.edu) Date: Feb 28, 2001 12:50:33 PM Subject: Problem karlsuss 2001-02-28 12:50:31: unstable focusing & lousy exposure - oscillating WEC? Message-ID: