Problem karlsuss 2001-02-03 18:18:42: loss of wafer vac & gap distance variable

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Sat Feb 3 06:18:43 PST 2001


every wafer got a loss of wafer vac at wec, but seemed to be held to the chuck just fine during alignment.  The gap between the wafer and the mask was variable. sometimes it was much greater than the setting of 40um, and sometimes it was just fine. 
???




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