Problem karlsuss 2001-02-07 09:23:44: WEC gapping all screwed up

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Wed Feb 7 09:23:45 PST 2001


display says my wafer in hard contact, when in fact it is about 
50um away.  Worked fine for first few wafers, then just suddenly crapped out.  Tried running some test wafers through in soft and hard contact, hoping that cycling through the exposure program might help.  It did not.




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