Problem karlsuss 2001-02-14 14:32:28: WEC not leveling wafer properly

hansen at snf.stanford.edu hansen at snf.stanford.edu
Wed Feb 14 02:32:30 PST 2001


The WEC is not leveling the wafer properly.  Mahnaz advised that the equipment not be shutdown for user with large feature sizes.  However, those with small features will presumably have proximity exposure on one side.




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