Problem karlsuss 2001-02-19 04:34:19: WEC not working properly for 2um lines

yangxu at snf.stanford.edu yangxu at snf.stanford.edu
Mon Feb 19 04:34:21 PST 2001


exposure was good for 2um lines on the upper half of the 4 inch wafer, it didn't work for the lower half of the wafer 




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