Problem karlsuss 2001-02-24 16:49:33: Karlsuss "overcurrent" problem

park at snf.stanford.edu park at snf.stanford.edu
Sat Feb 24 04:49:35 PST 2001


When I increase the gap distance after unloading the sample.
Somehow, I can not select the right program and every gap and exposure time become 30000 seomwhere. And then I choose one of them my mask drop and machine said "OVERCURRENT". And then never come back.




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