Shutdown karlsuss 2001-02-25 15:08:36: shutdown--Suss will not initialize
mahnaz at snf.stanford.edu
mahnaz at snf.stanford.edu
Mon Feb 26 09:23:06 PST 2001
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Shutdown karlsuss 2001-02-25 15:08:36: shutdown--Suss will not initialize
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Problem karlsuss 2001-02-26 22:32:20: loss of wafer vac/ poor focus
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Mario checked and reset the system.
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Shutdown karlsuss 2001-02-25 15:08:36: shutdown--Suss will not initialize
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Problem karlsuss 2001-02-26 22:32:20: loss of wafer vac/ poor focus
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