From vilanova at snf.stanford.edu Wed Jun 6 02:51:54 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jun 6, 2001 2:51:54 PM Subject: Problem karlsuss 2001-05-17 14:19:58: BSA right microscope out of focus Message-ID: CPU has Been Replaced, Ok for Top and Back Side Aligment From yangxu at snf.stanford.edu Tue Jun 12 11:34:22 2001 From: yangxu at snf.stanford.edu (yangxu at snf.stanford.edu) Date: Jun 12, 2001 11:34:22 PM Subject: Shutdown karlsuss 2001-06-12 23:34:20: "reset mechanics failed" Message-ID: Machine unable to restart and reach standby state because error of "reset mechanics failed". From vilanova at snf.stanford.edu Wed Jun 13 06:37:55 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jun 13, 2001 6:37:55 AM Subject: Shutdown karlsuss 2001-06-12 23:34:20: "reset mechanics failed" Message-ID: System Re-Started Checked it , Working ok From yangxu at snf.stanford.edu Thu Jun 14 04:23:40 2001 From: yangxu at snf.stanford.edu (yangxu at snf.stanford.edu) Date: Jun 14, 2001 4:23:40 AM Subject: Shutdown karlsuss 2001-06-14 04:23:38: Sorry, met "reset failed" error Message-ID: Sorry I met "reset machanics failed" error again. From vilanova at snf.stanford.edu Thu Jun 14 07:14:06 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jun 14, 2001 7:14:06 AM Subject: Shutdown karlsuss 2001-06-14 04:23:38: Message-ID: Machine Restarted , Ok to use From lindaw at snf.stanford.edu Mon Jun 25 09:55:38 2001 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Jun 25, 2001 9:55:38 AM Subject: Problem karlsuss 2001-06-25 09:55:38: Frontside optics having big problems (Noise) Message-ID: The signal to the video display from the front side optics is noisy such that it is unusable. Optics signal from bsa optics was fine during backside alignment. When I switched back to FSA, the signal from the front side optics was ok for about 20 seconds, then went all noisy again. From vilanova at snf.stanford.edu Mon Jun 25 10:42:20 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jun 25, 2001 10:42:20 AM Subject: Problem karlsuss 2001-06-25 09:55:38: Frontside optics having big problems (Noise) Message-ID: Found Loose Cable on the Back of monitor , ok to use From dton at snf.stanford.edu Thu Jun 28 06:35:39 2001 From: dton at snf.stanford.edu (dton at snf.stanford.edu) Date: Jun 28, 2001 6:35:39 PM Subject: Problem karlsuss 2001-06-28 18:35:37: Overcurrent problem during exposure Message-ID: Enabled the machine. Loaded in Mask. Loaded in wafer. Exposed with no alignment. Overcurrent error appeared. Tried it again. Work fine. Hmmm From martinez at snf.stanford.edu Thu Jun 28 09:14:38 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jun 28, 2001 9:14:38 PM Subject: Problem karlsuss 2001-06-28 18:35:37: Overcurrent problem during exposure Message-ID: reseated z motor connector, initialized system. ok to use From hansen at snf.stanford.edu Sat Jun 30 12:19:44 2001 From: hansen at snf.stanford.edu (hansen at snf.stanford.edu) Date: Jun 30, 2001 12:19:44 PM Subject: Problem karlsuss 2001-06-30 12:19:42: overcurrent errors Message-ID: After loading wafer, I received an "overcurrent error." Machine then appeared to reboot and faiiled mechanics test. Wasn't sure what to do at this point, so I left the machine in this state.