Problem karlsuss 2001-06-28 18:35:37: Overcurrent problem during exposure

dton at snf.stanford.edu dton at snf.stanford.edu
Thu Jun 28 06:35:39 PDT 2001


Enabled the machine.
Loaded in Mask.
Loaded in wafer.
Exposed with no alignment.
Overcurrent error appeared.
Tried it again.  Work fine.  Hmmm 




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