Problem karlsuss 2001-03-09 13:15:27: WEC problem ! and on going focus prob

caudillo at snf.stanford.edu caudillo at snf.stanford.edu
Fri Mar 9 01:15:30 PST 2001


The chuck is not coming up on occasion when performiong WEC. User should becareful specially at first layer when there is no pattern observed on the monitor. Look to your mask and wafer to see that it has made contact. This may prevent reworks at a time when useage is high. Please report this problem if it should experience it.




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