From fhj at snf.stanford.edu Wed May 9 12:45:29 2001 From: fhj at snf.stanford.edu (fhj at snf.stanford.edu) Date: May 9, 2001 12:45:29 PM Subject: Problem karlsuss 2001-05-09 12:45:28: karl suss Message-ID: video problem(setting?). cannot see mask or wafer well enough. From vilanova at snf.stanford.edu Wed May 9 01:46:22 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: May 9, 2001 1:46:22 PM Subject: Problem karlsuss 2001-05-09 12:45:28: karl suss Message-ID: NO problem found, Ok to use From mahnaz at snf.stanford.edu Thu May 10 10:23:43 2001 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: May 10, 2001 10:23:43 AM Subject: Problem karlsuss 2001-05-10 10:23:42: mirror house front move time out Message-ID: and it semms there is a problem with centering the chuck. I noticed some metal shavings on top of the exposure unit. From vilanova at snf.stanford.edu Thu May 10 10:43:18 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: May 10, 2001 10:43:18 AM Subject: Problem karlsuss 2001-05-10 10:23:42: mirror house front move time out Message-ID: Rebooted Sytem, Working ok ready to use From yangxu at snf.stanford.edu Sun May 13 10:18:45 2001 From: yangxu at snf.stanford.edu (yangxu at snf.stanford.edu) Date: May 13, 2001 10:18:45 PM Subject: Shutdown karlsuss 2001-05-13 22:18:44: Overcurrent error Message-ID: Overcurrent error showed up during backside alignment process. In every re-start procedure that was prompted by the machine, the overcurrent error always showed up again and the two microscopes for backside alignment always run into each other in the center. From mahnaz at snf.stanford.edu Mon May 14 11:13:52 2001 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: May 14, 2001 11:13:52 AM Subject: Shutdown karlsuss 2001-05-14 11:13:52: Message-ID: Reset the system, seems is ok. From mahnaz at snf.stanford.edu Mon May 14 11:14:06 2001 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: May 14, 2001 11:14:06 AM Subject: Shutdown karlsuss 2001-05-14 11:14:05: Message-ID: From mahnaz at snf.stanford.edu Mon May 14 11:15:34 2001 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: May 14, 2001 11:15:34 AM Subject: Shutdown karlsuss 2001-05-14 11:14:05: reset the system. Message-ID: From mahnaz at snf.stanford.edu Mon May 14 11:15:48 2001 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: May 14, 2001 11:15:48 AM Subject: Shutdown karlsuss 2001-05-14 11:13:52: reset the system. Message-ID: From mahnaz at snf.stanford.edu Mon May 14 11:16:32 2001 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: May 14, 2001 11:16:32 AM Subject: Shutdown karlsuss 2001-05-13 22:18:44: Overcurrent error Message-ID: the system is reset `. From pzwahlen at snf.stanford.edu Thu May 17 02:19:58 2001 From: pzwahlen at snf.stanford.edu (pzwahlen at snf.stanford.edu) Date: May 17, 2001 2:19:58 PM Subject: Problem karlsuss 2001-05-17 14:19:58: BSA right microscope out of focus Message-ID: BSA problem The focus on the right microscope goes out of focus as soon as one grabs the image. Pascal Zwahlen From afreeman at snf.stanford.edu Thu May 24 04:30:24 2001 From: afreeman at snf.stanford.edu (afreeman at snf.stanford.edu) Date: May 24, 2001 4:30:24 PM Subject: Problem karlsuss 2001-05-24 16:30:22: bsa over current shutdown dropping the mask Message-ID: when grab image is pressed for bsa, it shows "cannot contiue, over current problem, enter" when enter is pressed, the machine restarts essentially dropping the mask. alex From martinez at snf.stanford.edu Thu May 24 08:48:00 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: May 24, 2001 8:48:00 PM Subject: Problem karlsuss 2001-05-24 16:30:22: bsa over current shutdown dropping the mask Message-ID: set up grab z position. ok now. From ssinha at snf.stanford.edu Tue May 29 04:03:27 2001 From: ssinha at snf.stanford.edu (ssinha at snf.stanford.edu) Date: May 29, 2001 4:03:27 PM Subject: Comment karlsuss 2001-05-29 16:03:26: Message-ID: The lamp unit after moving over to the mask, causes the KS to freeze. This happened twice over a 2 hour period! This was rectified after rebooting the system. From caudillo at snf.stanford.edu Wed May 30 02:17:27 2001 From: caudillo at snf.stanford.edu (caudillo at snf.stanford.edu) Date: May 30, 2001 2:17:27 AM Subject: Shutdown karlsuss 2001-05-30 02:17:27: controls are locked up Message-ID: system is locked up. touch pad keys do not respond. From vilanova at snf.stanford.edu Wed May 30 08:13:08 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: May 30, 2001 8:13:08 AM Subject: Shutdown karlsuss 2001-05-30 02:17:27: controls are locked up Message-ID: Control Panel Restored. From vilanova at snf.stanford.edu Wed May 30 09:39:12 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: May 30, 2001 9:39:12 AM Subject: Shutdown karlsuss 2001-05-30 09:39:12: software problem Message-ID: Problem with the Suss Software, the whole front panel gets stuck, Suss tech Support has been called. From martinez at snf.stanford.edu Wed May 30 03:04:06 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: May 30, 2001 3:04:06 PM Subject: Shutdown karlsuss 2001-05-30 09:39:12: software problem Message-ID: changed mask loading parameter as per suss f/s instruction. From kjliu at snf.stanford.edu Wed May 30 11:57:39 2001 From: kjliu at snf.stanford.edu (kjliu at snf.stanford.edu) Date: May 30, 2001 11:57:39 PM Subject: Problem karlsuss 2001-05-30 23:57:38: software glitch Message-ID: software locks up during exposure giving continuous exposure From caudillo at snf.stanford.edu Thu May 31 03:05:40 2001 From: caudillo at snf.stanford.edu (caudillo at snf.stanford.edu) Date: May 31, 2001 3:05:40 AM Subject: Problem karlsuss 2001-05-31 03:05:38: may not stop exposing / prss. Message-ID: 1. Intermitent problem: during expose it would stop on 0.9 seconds remainning (of my setting of 2.3 sec) and would continuelly expose and not retract back into place. 2. Gives warning during expose about the pressure. From vilanova at snf.stanford.edu Thu May 31 09:13:58 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: May 31, 2001 9:13:58 AM Subject: Problem karlsuss 2001-05-31 03:05:38: may not stop exposing / prss. Message-ID: Controls Restored , Still no back side aligment From vilanova at snf.stanford.edu Thu May 31 09:15:08 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: May 31, 2001 9:15:08 AM Subject: Problem karlsuss 2001-05-30 23:57:38: software glitch Message-ID: Controls Restored EEprom Changed , Still no back side Aligment.