Shutdown karlsuss 2001-05-13 22:18:44: Overcurrent error

yangxu at yangxu at
Sun May 13 10:18:45 PDT 2001

Overcurrent error showed up during backside alignment process. In every re-start procedure that was prompted by the machine,  the overcurrent error always showed up again and the two microscopes for backside alignment always run into each other in the center.

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