Shutdown karlsuss 2001-05-13 22:18:44: Overcurrent error

yangxu at snf.stanford.edu yangxu at snf.stanford.edu
Sun May 13 10:18:45 PDT 2001


Overcurrent error showed up during backside alignment process. In every re-start procedure that was prompted by the machine,  the overcurrent error always showed up again and the two microscopes for backside alignment always run into each other in the center.




More information about the karlsuss-pcs mailing list