From martinez at snf.stanford.edu Thu Nov 1 02:17:56 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Nov 1, 2001 2:17:56 PM Subject: Problem karlsuss 2001-10-31 21:04:52: OVERCURRENT error Message-ID: set up grab z position, exercized grab image function with no over current errors. ready for use From wada at snf.stanford.edu Sun Nov 4 08:34:41 2001 From: wada at snf.stanford.edu (wada at snf.stanford.edu) Date: Nov 4, 2001 8:34:41 AM Subject: Problem karlsuss 2001-11-04 08:34:39: loss of mask vacuum? Message-ID: From vilanova at snf.stanford.edu Mon Nov 5 07:39:40 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Nov 5, 2001 7:39:40 AM Subject: Problem karlsuss 2001-11-04 08:34:39: loss of mask vacuum? Message-ID: Mask Vacuum Tested it, Working Ok, Ready to use From yyao at snf.stanford.edu Sat Nov 10 02:42:17 2001 From: yyao at snf.stanford.edu (yyao at snf.stanford.edu) Date: Nov 10, 2001 2:42:17 PM Subject: Problem karlsuss 2001-11-10 14:42:16: grabimage doesn't function properly. Message-ID: From martinez at snf.stanford.edu Mon Nov 12 08:07:36 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Nov 12, 2001 8:07:36 AM Subject: Problem karlsuss 2001-11-10 14:42:16: grabimage doesn't function properly. Message-ID: cycled test wafer, could not duplicate problem. ready 4 use From mbartsch at snf.stanford.edu Tue Nov 13 12:50:40 2001 From: mbartsch at snf.stanford.edu (mbartsch at snf.stanford.edu) Date: Nov 13, 2001 12:50:40 PM Subject: Problem karlsuss 2001-11-13 12:50:40: Mask Vac Fails Message-ID: Exposed 2 wafers successfully, then changed out the mask for cleaning. When I tried to re-load the mask, I kept getting mask vac failure messages. From martinez at snf.stanford.edu Tue Nov 13 01:14:57 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Nov 13, 2001 1:14:57 PM Subject: Problem karlsuss 2001-11-13 12:50:40: Mask Vac Fails Message-ID: cleaned mask holder, loaded mask. From jdas at snf.stanford.edu Thu Nov 15 08:36:44 2001 From: jdas at snf.stanford.edu (jdas at snf.stanford.edu) Date: Nov 15, 2001 8:36:44 AM Subject: Problem karlsuss 2001-11-15 08:36:43: BSA magnification switch dont work Message-ID: Only left side BSA microscope response to the lo/hi magnification switch. From mtang at snf.stanford.edu Thu Nov 15 10:45:41 2001 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Nov 15, 2001 10:45:41 AM Subject: Shutdown karlsuss 2001-11-15 10:45:39: For maintenance repair of BSA Message-ID: Also had overcurrent on wec. From vilanova at snf.stanford.edu Thu Nov 15 11:28:21 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Nov 15, 2001 11:28:21 AM Subject: Problem karlsuss 2001-11-15 08:36:43: BSA magnification switch dont work Message-ID: tighted Loose magnification Switch Screw. Tested it working ok, ready to use From vilanova at snf.stanford.edu Thu Nov 15 11:29:00 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Nov 15, 2001 11:29:00 AM Subject: Shutdown karlsuss 2001-11-15 10:45:39: For maintenance repair of BSA Message-ID: BSA Repaired , tested it . working Ok . Ready to use