Problem karlsuss 2001-11-13 12:50:40: Mask Vac Fails

mbartsch at snf.stanford.edu mbartsch at snf.stanford.edu
Tue Nov 13 12:50:40 PST 2001


Exposed 2 wafers successfully, then changed out the mask for cleaning.  When I tried to re-load the mask, I kept getting mask vac failure messages.




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