From zappe at snf.stanford.edu  Wed Sep  5 04:34:55 2001
From: zappe at snf.stanford.edu (zappe at snf.stanford.edu)
Date: Sep 5, 2001 4:34:55 AM
Subject: Shutdown karlsuss 2001-09-05 04:34:53: Reset Mechanics Failed
Message-ID: <mailman.257.1357938449.25750.karlsuss-pcs@snf.stanford.edu>

y-axis went out of range during mask adjustment
machine did not respomd to any key



From mahnaz at snf.stanford.edu  Wed Sep  5 09:15:06 2001
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Sep 5, 2001 9:15:06 AM
Subject: Shutdown karlsuss 2001-09-05 04:34:53: Reset Mechanics Failed
Message-ID: <mailman.258.1357938449.25750.karlsuss-pcs@snf.stanford.edu>

I reset the system but it seems that the chuck is drifting and y goes out of range. Try to move the y till beeping goes out. 



From fhj at snf.stanford.edu  Wed Sep  5 11:26:32 2001
From: fhj at snf.stanford.edu (fhj at snf.stanford.edu)
Date: Sep 5, 2001 11:26:32 AM
Subject: Comment karlsuss 2001-09-05 11:26:31: karl Suss
Message-ID: <mailman.259.1357938449.25750.karlsuss-pcs@snf.stanford.edu>

WEC seems to be low on the left side. I was repeatedly missing some structures on the left side of my array. Inspection of my mask showed no signs of something that could cause this. I could also see on the monitor that my left align contact was not as close as my right align contact. Frank



From rishton at snf.stanford.edu  Wed Sep  5 03:19:12 2001
From: rishton at snf.stanford.edu (rishton at snf.stanford.edu)
Date: Sep 5, 2001 3:19:12 PM
Subject: Problem karlsuss 2001-09-05 15:13:55: 
Message-ID: <mailman.260.1357938449.25750.karlsuss-pcs@snf.stanford.edu>

Wedge error compensation not working.  Mask and substrate are a long way out of focus.  



From martinez at snf.stanford.edu  Thu Sep  6 12:37:59 2001
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Sep 6, 2001 12:37:59 PM
Subject: Problem karlsuss 2001-09-05 15:13:55: suss
Message-ID: <mailman.261.1357938449.25750.karlsuss-pcs@snf.stanford.edu>

initialized wec system. ready for use.



From caudillo at snf.stanford.edu  Thu Sep  6 07:15:37 2001
From: caudillo at snf.stanford.edu (caudillo at snf.stanford.edu)
Date: Sep 6, 2001 7:15:37 PM
Subject: Problem karlsuss 2001-09-06 19:15:30: WEC is not working
Message-ID: <mailman.262.1357938449.25750.karlsuss-pcs@snf.stanford.edu>




From martinez at snf.stanford.edu  Thu Sep  6 09:01:54 2001
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Sep 6, 2001 9:01:54 PM
Subject: Problem karlsuss 2001-09-06 19:15:30: WEC is not working
Message-ID: <mailman.263.1357938449.25750.karlsuss-pcs@snf.stanford.edu>

set up grab z position, cycled two test wafers in
vac contact mode. tested ok. ready for use.



From martinez at snf.stanford.edu  Thu Sep  6 09:02:52 2001
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Sep 6, 2001 9:02:52 PM
Subject: Comment karlsuss 2001-09-06 21:02:52: suss
Message-ID: <mailman.264.1357938449.25750.karlsuss-pcs@snf.stanford.edu>

set up grab z position, cycled two test wafers in
vac contact mode. tested good. ready for use.