From pzwahlen at snf.stanford.edu Mon Apr 1 06:40:01 2002 From: pzwahlen at snf.stanford.edu (pzwahlen at snf.stanford.edu) Date: Apr 1, 2002 6:40:01 PM Subject: Problem karlsuss 2002-04-01 18:40:00: Topside microscope focusing problems Message-ID: The fine ajustment focusing knobs for the topside (focusing on the mask) don't work. One has to use the bottom substrate knobs. Then, when loading the wafer the focus is offset by the thickness of the wafer. Also, I couldn't get the same illumination on both sides. There is an important focusing shift between left and right side From vilanova at snf.stanford.edu Tue Apr 2 08:26:12 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Apr 2, 2002 8:26:12 AM Subject: Problem karlsuss 2002-04-01 18:40:00: Topside microscope focusing problems Message-ID: lamp changed, tested Topside microscope, working ok Ok to use