Problem karlsuss 2002-04-01 18:40:00: Topside microscope focusing problems

pzwahlen at snf.stanford.edu pzwahlen at snf.stanford.edu
Mon Apr 1 06:40:01 PST 2002


The fine ajustment focusing knobs for the topside (focusing on the mask) don't work. One has to use the bottom substrate knobs. Then, when loading the wafer the focus is offset by the thickness of the wafer. 
Also, I couldn't get the same illumination on both sides.
There is an important focusing shift between left and right side




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