From vilanova at snf.stanford.edu Thu Aug 1 01:47:20 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Aug 1, 2002 1:47:20 PM Subject: Problem karlsuss 2002-08-01 11:15:39: "dangerous" condition Message-ID: Dangerous Condition Cleared , Ok to use From volkan at snf.stanford.edu Thu Aug 1 03:49:07 2002 From: volkan at snf.stanford.edu (volkan at snf.stanford.edu) Date: Aug 1, 2002 3:49:07 PM Subject: Problem karlsuss 2002-08-01 15:49:00: loss of vacuum, "dangerous condition" warning Message-ID: We had loss of vacuum problem; the machine put itself into "dangerous condition". (Right now, it gives "chuck out of range" error message.) From uli at snf.stanford.edu Thu Aug 1 04:19:05 2002 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Aug 1, 2002 4:19:05 PM Subject: Shutdown karlsuss 2002-08-01 16:19:04: down due to "dangerous condition" Message-ID: From martinez at snf.stanford.edu Fri Aug 2 08:13:32 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Aug 2, 2002 8:13:32 AM Subject: Shutdown karlsuss 2002-08-01 16:19:04: down due to "dangerous condition" Message-ID: centered wec head, cleaned sticky tape residue from quartz chuck, adj wec pressure, set up grab z position. exposed and developed five wafers in hard contact mode and five in vac contact mode. no errors, resolution looks good. ok to use From martinez at snf.stanford.edu Fri Aug 2 08:13:46 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Aug 2, 2002 8:13:46 AM Subject: Problem karlsuss 2002-08-01 15:49:00: loss of vacuum, "dangerous condition" warning Message-ID: problem cleared From sabnis at snf.stanford.edu Tue Aug 6 12:35:33 2002 From: sabnis at snf.stanford.edu (sabnis at snf.stanford.edu) Date: Aug 6, 2002 12:35:33 PM Subject: Problem karlsuss 2002-08-06 12:35:32: 4 inch mask holder Message-ID: The 4 inch mask holder is not holding vacuum properly. It drops my mask as soon as I load the mask into the mask frame. There does not seem to be a problem with using the 5 inch mask holder, so the problem is definitely isolated to the 4 inch mask holder only. From martinez at snf.stanford.edu Tue Aug 6 01:22:33 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Aug 6, 2002 1:22:33 PM Subject: Problem karlsuss 2002-08-06 12:35:32: 4 inch mask holder Message-ID: bypassed four inch mask holder vacuum interlock. From sroy at snf.stanford.edu Mon Aug 19 12:07:00 2002 From: sroy at snf.stanford.edu (sroy at snf.stanford.edu) Date: Aug 19, 2002 12:07:00 AM Subject: Problem karlsuss 2002-08-19 00:06:59: overcurrent Message-ID: not operating properly - overcurrent error after load mask and wafer but before exposure - machine restarts From vilanova at snf.stanford.edu Mon Aug 19 07:55:11 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Aug 19, 2002 7:55:11 AM Subject: Problem karlsuss 2002-08-19 00:06:59: overcurrent Message-ID: Found Top Microscope Moved to the End position. System Re-Initialized, Loaded mask , working ok, Wafers Exposed Working ok, Ready to use. From martinez at snf.stanford.edu Fri Aug 23 04:29:30 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Aug 23, 2002 4:29:30 PM Subject: Shutdown karlsuss 2002-08-23 16:29:29: shutdown Message-ID: not available for use karlsuss2 should be ready by monday