Shutdown karlsuss 2002-08-01 16:19:04: down due to "dangerous condition"

martinez at snf.stanford.edu martinez at snf.stanford.edu
Fri Aug 2 08:13:32 PDT 2002


centered wec head, cleaned sticky tape residue from quartz 
chuck, adj wec pressure, set up grab z position. exposed and
developed five wafers in hard contact mode and five in vac
contact mode. no errors, resolution looks good. ok to use




More information about the karlsuss-pcs mailing list