From vilanova at snf.stanford.edu Fri Feb 1 07:55:39 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Feb 1, 2002 7:55:39 AM Subject: Problem karlsuss 2002-01-31 22:27:06: z axis problem Message-ID: chuck Stage Reseted , tested it , working ok No overcurrent messages, ready to use From jackson at snf.stanford.edu Sat Feb 2 01:49:05 2002 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Feb 2, 2002 1:49:05 PM Subject: Problem karlsuss 2002-02-02 13:49:04: karlsuss Message-ID: 3 times during using an error would state "overcurrent, press load to restart' This worked okay until the last time and now it says "microscope up time out" and will not reset. From qtang at snf.stanford.edu Sun Feb 3 02:16:12 2002 From: qtang at snf.stanford.edu (qtang at snf.stanford.edu) Date: Feb 3, 2002 2:16:12 AM Subject: Problem karlsuss 2002-02-03 02:16:12: karlsuss stop working Message-ID: it suddenly went wrong, drop mask. Need to restart. From qtang at snf.stanford.edu Sun Feb 3 02:16:31 2002 From: qtang at snf.stanford.edu (qtang at snf.stanford.edu) Date: Feb 3, 2002 2:16:31 AM Subject: Shutdown karlsuss 2002-02-03 02:16:29: Message-ID: From vilanova at snf.stanford.edu Mon Feb 4 10:53:45 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Feb 4, 2002 10:53:45 AM Subject: Problem karlsuss 2002-02-02 13:49:04: karlsuss Message-ID: Microscopes tested, working ok , no overcurrent problem after Reseting grab Z position . From vilanova at snf.stanford.edu Mon Feb 4 10:54:32 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Feb 4, 2002 10:54:32 AM Subject: Problem karlsuss 2002-02-03 02:16:12: karlsuss stop working Message-ID: NO overcurrent found after reseting Grab Z Position From vilanova at snf.stanford.edu Mon Feb 4 10:55:23 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Feb 4, 2002 10:55:23 AM Subject: Shutdown karlsuss 2002-02-03 02:16:29: NO overcurrent Message-ID: NO overcurrent found after reseting grab Z POsition From vilanova at snf.stanford.edu Mon Feb 4 10:55:56 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Feb 4, 2002 10:55:56 AM Subject: Shutdown karlsuss 2002-02-04 10:55:55: MOnitor Not working Message-ID: From martinez at snf.stanford.edu Tue Feb 5 01:27:40 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Feb 5, 2002 1:27:40 PM Subject: Shutdown karlsuss 2002-02-04 10:55:55: MOnitor Not working Message-ID: replaced video amp fuses, initialized system, cycled test wafer From kenney at snf.stanford.edu Thu Feb 7 01:11:33 2002 From: kenney at snf.stanford.edu (kenney at snf.stanford.edu) Date: Feb 7, 2002 1:11:33 AM Subject: Shutdown karlsuss 2002-02-07 01:11:32: Karl Suss-over current, microscope Message-ID: The Karl Suss reported an 'over current' error during a wafer load. The microscope will not move up at start up. The previous user was doing a long exposure and had a special UV lamb set up which required that the microscoope unit be extended to its limit for a long period of time. Perhaps related? From martinez at snf.stanford.edu Thu Feb 7 07:55:24 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Feb 7, 2002 7:55:24 AM Subject: Shutdown karlsuss 2002-02-07 01:11:32: Karl Suss-over current, microscope Message-ID: video fuses blown again. replaced fuses. also, mask holder vacuum connector was not properly seated. From zhang at snf.stanford.edu Sat Feb 16 09:08:39 2002 From: zhang at snf.stanford.edu (zhang at snf.stanford.edu) Date: Feb 16, 2002 9:08:39 PM Subject: Problem karlsuss 2002-02-16 21:08:38: overcurrent for no reason Message-ID: 7um PR exposure. Backside alignment. Had no problem with one test wafer but not afterwards (exactly the same condition as the test wafer). Followed screen instructions to initialize the machine but it did not work. From martinez at snf.stanford.edu Tue Feb 19 09:57:14 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Feb 19, 2002 9:57:14 AM Subject: Problem karlsuss 2002-02-16 21:08:38: overcurrent for no reason Message-ID: initialized system parameters, cycled test wafer 5u lines look good on 1.0u 3612 resist From mcconnel at snf.stanford.edu Fri Feb 22 12:25:59 2002 From: mcconnel at snf.stanford.edu (mcconnel at snf.stanford.edu) Date: Feb 22, 2002 12:25:59 AM Subject: Problem karlsuss 2002-02-22 00:25:57: overcurrent error Message-ID: Every other time I load a wafer there is an overcurrent problem, which causes the mask to drop down onto the wafer, ruining the photoresist. After this, the machine goes through some stupid startup routine, which is now causing the problem. The machine is stuck because it is trying to move the microscope for some unknown reason but can't.