Shutdown karlsuss 2002-02-07 01:11:32: Karl Suss-over current, microscope

kenney at snf.stanford.edu kenney at snf.stanford.edu
Thu Feb 7 01:11:33 PST 2002


The Karl Suss reported an 'over current' error during a
wafer load. The microscope will not move up at start
up.
The previous user was doing a long exposure and had
a special UV lamb set up which required that the
microscoope unit be extended to its limit for a long
period of time. Perhaps related?




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