Problem karlsuss 2002-02-16 21:08:38: overcurrent for no reason

zhang at zhang at
Sat Feb 16 09:08:39 PST 2002

7um PR exposure. Backside alignment. Had no problem with 
one test wafer but not afterwards (exactly the same condition 
as the test wafer). Followed screen instructions to initialize the 
machine but it did not work.

More information about the karlsuss-pcs mailing list