Problem karlsuss 2002-02-22 00:25:57: overcurrent error

mcconnel at snf.stanford.edu mcconnel at snf.stanford.edu
Fri Feb 22 12:25:59 PST 2002


Every other time I load a wafer there is an overcurrent problem, which causes the mask to drop down onto the wafer, ruining the photoresist.  After this, the machine goes through some stupid startup routine, which is now causing the problem.  The machine is stuck because it is trying to move the microscope for some unknown reason but can't.




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