From wliu at snf.stanford.edu Wed Jan 9 10:35:57 2002 From: wliu at snf.stanford.edu (wliu at snf.stanford.edu) Date: Jan 9, 2002 10:35:57 PM Subject: Problem karlsuss 2002-01-09 22:35:56: Left and Right Objective lenses not focused in parallel Message-ID: Left and right focal point far apart From wliu at snf.stanford.edu Thu Jan 10 12:25:36 2002 From: wliu at snf.stanford.edu (wliu at snf.stanford.edu) Date: Jan 10, 2002 12:25:36 AM Subject: Problem karlsuss 2002-01-10 00:25:35: wafer shifts during exposure Message-ID: wafer shifts around during exposure...loss of vacuum after loading wafer... From vilanova at snf.stanford.edu Thu Jan 10 08:44:00 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jan 10, 2002 8:44:00 AM Subject: Problem karlsuss 2002-01-09 22:35:56: Left and Right Objective lenses not focused in parallel Message-ID: Left and right lenses are working fine. I've adjusted the wec ( no overcurrent ) Ok to use From vilanova at snf.stanford.edu Thu Jan 10 08:44:57 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jan 10, 2002 8:44:57 AM Subject: Problem karlsuss 2002-01-10 00:25:35: wafer shifts during exposure Message-ID: I've adjusted the Wec and also the grab Z position No more Overcurrent signal Ok to use. From sergei at snf.stanford.edu Tue Jan 15 12:18:05 2002 From: sergei at snf.stanford.edu (sergei at snf.stanford.edu) Date: Jan 15, 2002 12:18:05 AM Subject: Comment karlsuss 2002-01-15 00:18:04: karlsuss monitor blinking Message-ID: Alignment monitor is constantly blinking. Control knobs did not help to stop it. It's probably still OK for first photolithography, but not for me. :( From sergei at snf.stanford.edu Tue Jan 15 02:29:59 2002 From: sergei at snf.stanford.edu (sergei at snf.stanford.edu) Date: Jan 15, 2002 2:29:59 AM Subject: Problem karlsuss 2002-01-15 02:29:58: karlsuss alignment monitor is OK Message-ID: False alarm. Somebody just moved objectives out of range. As soon as I moved them back in normal position blinking stopped and I was able to process my wafers. From vilanova at snf.stanford.edu Tue Jan 15 06:49:28 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jan 15, 2002 6:49:28 AM Subject: Problem karlsuss 2002-01-15 02:29:58: karlsuss alignment monitor is OK Message-ID: User Error , NO problem found, Working ok From wkim at snf.stanford.edu Tue Jan 15 11:44:56 2002 From: wkim at snf.stanford.edu (wkim at snf.stanford.edu) Date: Jan 15, 2002 11:44:56 PM Subject: Problem karlsuss 2002-01-15 23:44:55: Monitor Message-ID: The monitor connection seems bad. It was blinking right before I started my job but I could finish my work because it didn't require any alignment but I think it's going to be a problem to those who want alignments. From vilanova at snf.stanford.edu Wed Jan 16 08:05:27 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jan 16, 2002 8:05:27 AM Subject: Problem karlsuss 2002-01-15 23:44:55: Monitor Message-ID: this is an intermitent problem that goes away when you put the mask holder into position. this has nothing to do with aligment marks. tested , working ok ready to use. From isagiv at snf.stanford.edu Sun Jan 27 05:30:56 2002 From: isagiv at snf.stanford.edu (isagiv at snf.stanford.edu) Date: Jan 27, 2002 5:30:56 PM Subject: Problem karlsuss 2002-01-27 17:30:54: doesn't work! Message-ID: From martinez at snf.stanford.edu Mon Jan 28 08:06:04 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jan 28, 2002 8:06:04 AM Subject: Problem karlsuss 2002-01-27 17:30:54: doesn't work! Message-ID: exposed and developed test wafer. no problem found. From isagiv at snf.stanford.edu Tue Jan 29 10:08:32 2002 From: isagiv at snf.stanford.edu (isagiv at snf.stanford.edu) Date: Jan 29, 2002 10:08:32 PM Subject: Shutdown karlsuss 2002-01-29 22:08:31: won't respond to anything! Message-ID: From cbaxter at snf.stanford.edu Tue Jan 29 10:45:53 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 29, 2002 10:45:53 PM Subject: Shutdown karlsuss 2002-01-29 22:08:31: won't respond to anything! Message-ID: push enter a couple times, microscope started to reset. From casey at snf.stanford.edu Wed Jan 30 12:56:18 2002 From: casey at snf.stanford.edu (casey at snf.stanford.edu) Date: Jan 30, 2002 12:56:18 AM Subject: Problem karlsuss 2002-01-30 00:56:15: wec not working right Message-ID: the machine says it is performing wec, but the wafer never approaches the mask height From martinez at snf.stanford.edu Wed Jan 30 09:30:02 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jan 30, 2002 9:30:02 AM Subject: Problem karlsuss 2002-01-30 00:56:15: wec not working right Message-ID: initialized wec head, tested, ready to use From kjliu at snf.stanford.edu Thu Jan 31 10:27:07 2002 From: kjliu at snf.stanford.edu (kjliu at snf.stanford.edu) Date: Jan 31, 2002 10:27:07 PM Subject: Problem karlsuss 2002-01-31 22:27:06: z axis problem Message-ID: many overcurrent warnings. stage makes loud clunking sound upon lowering wafer from mask.