Problem karlsuss 2002-01-15 02:29:58: karlsuss alignment monitor is OK

sergei at snf.stanford.edu sergei at snf.stanford.edu
Tue Jan 15 02:29:59 PST 2002


False alarm. Somebody just moved objectives out of range.
As soon as I moved them back in normal position blinking 
stopped and I was able to process my wafers.




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