From wliu at snf.stanford.edu Mon Jul 8 10:34:07 2002 From: wliu at snf.stanford.edu (wliu at snf.stanford.edu) Date: Jul 8, 2002 10:34:07 PM Subject: Problem karlsuss 2002-07-08 22:34:07: Loud beep heard right after exposure... Message-ID: Maybe UV lamp going bad... checked exposure and center of wafer appeared bad... Tried exposing on EV and exposure turned out good. From martinez at snf.stanford.edu Tue Jul 9 08:16:30 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jul 9, 2002 8:16:30 AM Subject: Problem karlsuss 2002-07-08 22:34:07: Loud beep heard right after exposure... Message-ID: replaced lamp From volkan at snf.stanford.edu Wed Jul 17 06:15:33 2002 From: volkan at snf.stanford.edu (volkan at snf.stanford.edu) Date: Jul 17, 2002 6:15:33 PM Subject: Problem karlsuss 2002-07-17 18:15:32: general loss of pressure Message-ID: After "wec" leveling, we had general loss of pressure. Upon reseting the machine, everything worked well. From wliu at snf.stanford.edu Thu Jul 18 12:48:21 2002 From: wliu at snf.stanford.edu (wliu at snf.stanford.edu) Date: Jul 18, 2002 12:48:21 PM Subject: Problem karlsuss 2002-07-18 12:48:21: TSA microscope focus notchy Message-ID: The TSA microscope (left side) focus is very notchy and not smooth. Focus jumps around. From vilanova at snf.stanford.edu Fri Jul 19 08:01:53 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 19, 2002 8:01:53 AM Subject: Problem karlsuss 2002-07-17 18:15:32: general loss of pressure Message-ID: loss of pressure due to a broken mask pieces found in wec. From yongli at snf.stanford.edu Fri Jul 19 07:34:37 2002 From: yongli at snf.stanford.edu (yongli at snf.stanford.edu) Date: Jul 19, 2002 7:34:37 PM Subject: Problem karlsuss 2002-07-19 19:34:36: Lost mask vacuum Message-ID: From mahnaz at snf.stanford.edu Tue Jul 23 04:01:23 2002 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Jul 23, 2002 4:01:23 PM Subject: Shutdown karlsuss 2002-07-23 16:01:23: KS engineer Message-ID: working on the system. From mahnaz at snf.stanford.edu Thu Jul 25 05:29:39 2002 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Jul 25, 2002 5:29:39 PM Subject: Shutdown karlsuss 2002-07-23 16:01:23: KS engineer Message-ID: set From mahnaz at snf.stanford.edu Thu Jul 25 05:29:58 2002 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Jul 25, 2002 5:29:58 PM Subject: Problem karlsuss 2002-07-19 19:34:36: Lost mask vacuum Message-ID: The pM is done by KS eng. From mahnaz at snf.stanford.edu Thu Jul 25 05:30:10 2002 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Jul 25, 2002 5:30:10 PM Subject: Problem karlsuss 2002-07-18 12:48:21: TSA microscope focus notchy Message-ID: The pm is done by Ks eng. From mahnaz at snf.stanford.edu Thu Jul 25 05:30:24 2002 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Jul 25, 2002 5:30:24 PM Subject: Problem karlsuss 2002-06-27 16:51:50: lost mask vacuum Message-ID: the system had a pm From mahnaz at snf.stanford.edu Thu Jul 25 05:30:35 2002 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Jul 25, 2002 5:30:35 PM Subject: Problem karlsuss 2002-06-27 01:40:21: Mask Hold Vaccum Toggle problem Message-ID: is fixed From mcconnel at snf.stanford.edu Mon Jul 29 12:50:39 2002 From: mcconnel at snf.stanford.edu (mcconnel at snf.stanford.edu) Date: Jul 29, 2002 12:50:39 PM Subject: Problem karlsuss 2002-07-29 12:50:38: overcurrent while changing sep. gap Message-ID: While I was decreasing the separation gap during alignment, there was an overcurrent error. From martinez at snf.stanford.edu Mon Jul 29 01:32:06 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jul 29, 2002 1:32:06 PM Subject: Problem karlsuss 2002-07-29 12:50:38: overcurrent while changing sep. gap Message-ID: reloaded system parameters. ready for use From casey at snf.stanford.edu Mon Jul 29 03:37:10 2002 From: casey at snf.stanford.edu (casey at snf.stanford.edu) Date: Jul 29, 2002 3:37:10 PM Subject: Problem karlsuss 2002-07-29 15:37:09: overcurrent resulting in loss of mask vacuum Message-ID: BEWARE-- it'll drop your mask on your wafer and make you grumpy!! From martinez at snf.stanford.edu Tue Jul 30 08:00:05 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jul 30, 2002 8:00:05 AM Subject: Shutdown karlsuss 2002-07-30 08:00:04: shutdown ks Message-ID: over current during wec-drops mask From vilanova at snf.stanford.edu Tue Jul 30 10:51:26 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 30, 2002 10:51:26 AM Subject: Problem karlsuss 2002-07-29 15:37:09: overcurrent resulting in loss of mask vacuum Message-ID: Found a Broken Piece of mask Blocking the wec Pressure Motor, Ran 5 wafers, working ok . ready to use From vilanova at snf.stanford.edu Tue Jul 30 10:52:30 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 30, 2002 10:52:30 AM Subject: Shutdown karlsuss 2002-07-30 08:00:04: shutdown ks Message-ID: A piece of Broken mask Blocking Wec plate.