Problem karlsuss 2002-07-08 22:34:07: Loud beep heard right after exposure...

wliu at snf.stanford.edu wliu at snf.stanford.edu
Mon Jul 8 10:34:07 PDT 2002

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Maybe UV lamp going bad...  checked exposure and center of wafer appeared bad...  Tried exposing on EV and exposure turned out good.

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