Problem karlsuss 2002-07-29 15:37:09: overcurrent resulting in loss of mask vacuum

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Jul 30 10:51:26 PDT 2002

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Found a Broken Piece of mask Blocking the wec Pressure
Motor, Ran 5 wafers, working ok . ready to use

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