Problem karlsuss 2002-06-27 16:51:50: lost mask vacuum

yyao at snf.stanford.edu yyao at snf.stanford.edu
Thu Jun 27 04:51:51 PDT 2002


When the tool was brought up around 3:00, schen did his process by unplug the vacuum line to get mask off.  When I got on, the problem changed.  The mask holder did not hold mask therefore I could not load mask.  There was always a warn: lost mask vacuum.




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