From caudillo at snf.stanford.edu Tue Mar 5 10:47:03 2002 From: caudillo at snf.stanford.edu (caudillo at snf.stanford.edu) Date: Mar 5, 2002 10:47:03 PM Subject: Shutdown karlsuss 2002-03-05 22:47:01: Problem: WEC won't expose Message-ID: From martinez at snf.stanford.edu Wed Mar 6 08:14:20 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mar 6, 2002 8:14:20 AM Subject: Shutdown karlsuss 2002-03-05 22:47:01: Problem: WEC won't expose Message-ID: reseated z motor ribbon cable connector initialized system, cycled wafer in soft contact mode. ready for use. From acopland at snf.stanford.edu Thu Mar 7 09:33:30 2002 From: acopland at snf.stanford.edu (acopland at snf.stanford.edu) Date: Mar 7, 2002 9:33:30 PM Subject: Problem karlsuss 2002-03-07 21:33:29: BSA Overcurrent Problem Message-ID: Overcurrent message after grabbing image on backside alignment From caudillo at snf.stanford.edu Fri Mar 8 01:54:24 2002 From: caudillo at snf.stanford.edu (caudillo at snf.stanford.edu) Date: Mar 8, 2002 1:54:24 AM Subject: Problem karlsuss 2002-03-08 01:54:22: Y micrometer problem Message-ID: The Y micrometer will no longer move to a setting of 5. Unable to achieve setting of < 8. From vilanova at snf.stanford.edu Mon Mar 11 11:56:59 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mar 11, 2002 11:56:59 AM Subject: Problem karlsuss 2002-03-07 21:33:29: BSA Overcurrent Problem Message-ID: Found Screw Inside of Stage causing stage to be obstructed, removed screw and stage worked fine. ok to use. From vilanova at snf.stanford.edu Mon Mar 11 11:58:02 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mar 11, 2002 11:58:02 AM Subject: Problem karlsuss 2002-03-08 01:54:22: Y micrometer problem Message-ID: found screw inside o fstage , removed screw and stage worked fine, ready to use. From psingh at snf.stanford.edu Sat Mar 16 09:29:51 2002 From: psingh at snf.stanford.edu (psingh at snf.stanford.edu) Date: Mar 16, 2002 9:29:51 AM Subject: Shutdown karlsuss 2002-03-16 09:29:50: Karl Suss (Microscope up move time out) Message-ID: Error Message: Microscope up move time out From vilanova at snf.stanford.edu Mon Mar 18 06:45:09 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mar 18, 2002 6:45:09 AM Subject: Shutdown karlsuss 2002-03-16 09:29:50: Karl Suss (Microscope up move time out) Message-ID: User error ,checked microscope, working perfecly fine Ok to use. From martinez at snf.stanford.edu Mon Mar 18 03:30:48 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mar 18, 2002 3:30:48 PM Subject: Comment karlsuss 2002-03-18 15:30:46: interlock Message-ID: the system interlock has been moved from the tv monitor to the mask holder vacuum port. From martinez at snf.stanford.edu Wed Mar 20 09:56:02 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mar 20, 2002 9:56:02 AM Subject: Shutdown karlsuss 2002-03-20 09:56:01: bsa alignment Message-ID: suss F/S here to align back side microscopes From vilanova at snf.stanford.edu Wed Mar 20 12:15:24 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mar 20, 2002 12:15:24 PM Subject: Shutdown karlsuss 2002-03-20 09:56:01: bsa alignment Message-ID: Aligned BSA Microscopes using 6mm mask Adjusted overcurrent pots on card # 8 to .900 Tested it , working Perfect , ready to use. From psingh at snf.stanford.edu Thu Mar 21 08:45:17 2002 From: psingh at snf.stanford.edu (psingh at snf.stanford.edu) Date: Mar 21, 2002 8:45:17 AM Subject: Problem karlsuss 2002-03-21 08:45:15: While Performing WEC wafer looses Vacuum Message-ID: While Performing WEC wafer looses vacuum From psingh at snf.stanford.edu Thu Mar 21 08:46:48 2002 From: psingh at snf.stanford.edu (psingh at snf.stanford.edu) Date: Mar 21, 2002 8:46:48 AM Subject: Comment karlsuss 2002-03-21 08:46:48: Wafer Looses vacuum while performing WEC Message-ID: From vilanova at snf.stanford.edu Thu Mar 21 09:22:45 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mar 21, 2002 9:22:45 AM Subject: Problem karlsuss 2002-03-21 08:45:15: While Performing WEC wafer looses Vacuum Message-ID: Grab Z position Re-Initilized , tested it working ok From hansen at snf.stanford.edu Tue Mar 26 06:34:34 2002 From: hansen at snf.stanford.edu (hansen at snf.stanford.edu) Date: Mar 26, 2002 6:34:34 PM Subject: Problem karlsuss 2002-03-26 18:34:34: Loss of wfr vac. on WEC Message-ID: The karlsuss was reporting loss of wafer vacuum during the WEC (although there was wafer vac. before wedge compensation). Not sure about the reason for this. No visible problem with vacumm getting to the chuck. From vilanova at snf.stanford.edu Wed Mar 27 07:41:22 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mar 27, 2002 7:41:22 AM Subject: Problem karlsuss 2002-03-26 18:34:34: Loss of wfr vac. on WEC Message-ID: Grab Z position Re-Initialized , tested ok, ready to use. From beckwith at snf.stanford.edu Wed Mar 27 04:59:52 2002 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Mar 27, 2002 4:59:52 PM Subject: Problem karlsuss 2002-03-27 16:59:49: cannot get both sides of split field into focus Message-ID: can get both sides focused if the top/bottom light is on, but as soon as the top/bottom light is turned off only one side is in focus. Makes it difficult for people who need to do an alignment. We exposed blank wafers only. It focused fine earlier in the day. From mahnaz at snf.stanford.edu Thu Mar 28 09:49:27 2002 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mar 28, 2002 9:49:27 AM Subject: Problem karlsuss 2002-03-27 16:59:49: cannot get both sides of split field into focus Message-ID: I checked the system during the training this morning, it is ok.