From jdas at snf.stanford.edu Wed May 1 12:49:32 2002 From: jdas at snf.stanford.edu (jdas at snf.stanford.edu) Date: May 1, 2002 12:49:32 PM Subject: Problem karlsuss 2002-05-01 12:49:31: lamp pwr supply beeps in CL2 Message-ID: From martinez at snf.stanford.edu Thu May 2 08:30:57 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: May 2, 2002 8:30:57 AM Subject: Problem karlsuss 2002-05-01 12:49:31: lamp pwr supply beeps in CL2 Message-ID: replaced and calibrated mercury arc lamp From mislam at snf.stanford.edu Fri May 3 12:12:53 2002 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: May 3, 2002 12:12:53 PM Subject: Problem karlsuss 2002-05-03 12:12:51: Pwr supply beeps CI2 Message-ID: From martinez at snf.stanford.edu Mon May 6 07:50:20 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: May 6, 2002 7:50:20 AM Subject: Problem karlsuss 2002-05-03 12:12:51: Pwr supply beeps CI2 Message-ID: replaced lamp, cleaned ellipsoidal mirror From mbartsch at snf.stanford.edu Tue May 14 03:29:55 2002 From: mbartsch at snf.stanford.edu (mbartsch at snf.stanford.edu) Date: May 14, 2002 3:29:55 PM Subject: Problem karlsuss 2002-05-14 15:29:54: RT backside lamp out Message-ID: From vilanova at snf.stanford.edu Wed May 15 07:38:40 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: May 15, 2002 7:38:40 AM Subject: Problem karlsuss 2002-05-14 15:29:54: RT backside lamp out Message-ID: Replaced backside lamp. From martinez at snf.stanford.edu Tue May 21 03:27:37 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: May 21, 2002 3:27:37 PM Subject: Shutdown karlsuss 2002-05-21 15:27:36: shutdown Message-ID: loss of mask vacuum From martinez at snf.stanford.edu Tue May 21 03:40:15 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: May 21, 2002 3:40:15 PM Subject: Shutdown karlsuss 2002-05-21 15:27:36: shutdown Message-ID: mask vacuum ok. ok to use From jdas at snf.stanford.edu Wed May 22 03:28:47 2002 From: jdas at snf.stanford.edu (jdas at snf.stanford.edu) Date: May 22, 2002 3:28:47 PM Subject: Problem karlsuss 2002-05-22 15:28:46: over current during backside algnment Message-ID: From martinez at snf.stanford.edu Wed May 22 03:42:57 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: May 22, 2002 3:42:57 PM Subject: Problem karlsuss 2002-05-22 15:28:46: over current during backside algnment Message-ID: reset system parameters, initialized system. ok to use From vilanova at snf.stanford.edu Fri May 24 03:03:46 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: May 24, 2002 3:03:46 PM Subject: Shutdown karlsuss 2002-05-24 15:03:45: overcurrent problem Message-ID: Overcurrent Problem. Top side Microscopes Jammed. From martinez at snf.stanford.edu Tue May 28 03:03:23 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: May 28, 2002 3:03:23 PM Subject: Shutdown karlsuss 2002-05-24 15:03:45: overcurrent problem Message-ID: adj flag for tsa down position From wliu at snf.stanford.edu Tue May 28 04:59:15 2002 From: wliu at snf.stanford.edu (wliu at snf.stanford.edu) Date: May 28, 2002 4:59:15 PM Subject: Problem karlsuss 2002-05-28 16:59:14: Left focus not very smooth... Message-ID: Left focus jumps into focus during focusing... Also at times, when going between TOP and BOTTOM, focus doesn't shift accordingly. From martinez at snf.stanford.edu Wed May 29 08:14:58 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: May 29, 2002 8:14:58 AM Subject: Problem karlsuss 2002-05-28 16:59:14: Left focus not very smooth... Message-ID: exposed,developed, and aligned test wafer. no problem found with tsa, bsa focus. ready for use