From vilanova at snf.stanford.edu Thu Dec 4 08:00:16 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 4 Dec 2003 08:00:16 -0800 Subject: Comment karlsuss 2003-10-31 16:51:34: switched lamps Message-ID: problem cleared From vilanova at snf.stanford.edu Thu Dec 4 08:00:29 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 4 Dec 2003 08:00:29 -0800 Subject: Comment karlsuss 2003-11-05 10:07:58: DUV Message-ID: cleared From vilanova at snf.stanford.edu Thu Dec 4 08:00:44 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 4 Dec 2003 08:00:44 -0800 Subject: Comment karlsuss 2003-11-07 10:18:34: lamp change Message-ID: problem cleared From mahnaz at snf.stanford.edu Thu Dec 4 12:16:00 2003 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 4 Dec 2003 12:16:00 -0800 Subject: Shutdown karlsuss 2003-12-04 12:15:59: non uniformity Message-ID: From martinez at snf.stanford.edu Thu Dec 4 13:47:31 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Thu, 4 Dec 2003 13:47:31 -0800 Subject: Comment karlsuss 2003-11-19 10:53:29: system will be in DUV mode Message-ID: uniformity = 3.40% within spec From martinez at snf.stanford.edu Thu Dec 4 13:48:20 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Thu, 4 Dec 2003 13:48:20 -0800 Subject: Shutdown karlsuss 2003-12-04 12:15:59: non uniformity Message-ID: uniformity = 3.40% within spec From martinez at snf.stanford.edu Tue Dec 16 16:37:24 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Tue, 16 Dec 2003 16:37:24 -0800 Subject: Comment karlsuss 2003-12-16 16:37:23: lamp switch Message-ID: system has been converted to 365nm CI2 = 15mw/cm2