From ericp at snf.stanford.edu Sun Mar 2 11:47:13 2003 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Mar 2, 2003 11:47:13 PM Subject: Problem karlsuss 2003-03-02 23:47:09: RH BSA lamp Message-ID: Light does not come on for the right side backside lamp. Intensity control has no effect. Left side is fine. From vilanova at snf.stanford.edu Mon Mar 3 08:12:52 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mar 3, 2003 8:12:52 AM Subject: Problem karlsuss 2003-03-02 23:47:09: Report Clear for karlsuss Message-ID: Replaced Burned lightbulb, ok to use From pindermu at snf.stanford.edu Mon Mar 3 09:15:59 2003 From: pindermu at snf.stanford.edu (pindermu at snf.stanford.edu) Date: Mar 3, 2003 9:15:59 PM Subject: Problem karlsuss 2003-03-03 21:15:58: Report Problem for karlsuss Message-ID: Power control is beeping (lamp life/power failure) From martinez at snf.stanford.edu Tue Mar 4 09:08:07 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mar 4, 2003 9:08:07 AM Subject: Shutdown karlsuss 2003-03-04 09:08:06: Report Shutdown for karlsuss Message-ID: lamp change From martinez at snf.stanford.edu Tue Mar 4 09:58:47 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mar 4, 2003 9:58:47 AM Subject: Problem karlsuss 2003-03-03 21:15:58: Report Clear for karlsuss Message-ID: replaced lamp From vilanova at snf.stanford.edu Tue Mar 4 10:02:03 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mar 4, 2003 10:02:03 AM Subject: Shutdown karlsuss 2003-03-04 09:08:06: Report Clear for karlsuss Message-ID: replaced lamp CI2=15mw/cm2 @ 365nm uniformity = 2.35% From dwshin at snf.stanford.edu Tue Mar 4 11:12:38 2003 From: dwshin at snf.stanford.edu (dwshin at snf.stanford.edu) Date: Mar 4, 2003 11:12:38 AM Subject: Problem karlsuss 2003-03-04 11:12:37: overcurrent Message-ID: over current problem occurred realigned center position but program switched to MA6 BSA originally TSA From vilanova at snf.stanford.edu Tue Mar 4 01:22:29 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mar 4, 2003 1:22:29 PM Subject: Problem karlsuss 2003-03-04 11:12:37: Report Clear for karlsuss Message-ID: No Overcurrent message found after testing. Equipment has been in use for the Last 2 hours with no overcurrent problem. From quickwin at snf.stanford.edu Wed Mar 5 07:47:42 2003 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Mar 5, 2003 7:47:42 PM Subject: Problem karlsuss 2003-03-05 19:47:42: focus problem Message-ID: During front side alignment, right side mask and wafer do not appear sharp at the same time. Left side is OK. Eric P was with me when we saw this problem so it couldn't be operator error. From quickwin at snf.stanford.edu Wed Mar 5 08:00:55 2003 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Mar 5, 2003 8:00:55 PM Subject: Problem karlsuss 2003-03-05 20:00:54: Focus problem 2 Message-ID: In addition to the previous problem I reported, the exposed wafer pattern looked very bad on the right side also. It seems to be a WEC problem. By the way, I used soft contact mode. From quickwin at snf.stanford.edu Wed Mar 5 08:22:36 2003 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Mar 5, 2003 8:22:36 PM Subject: Problem karlsuss 2003-03-05 20:22:35: Focus problem recovered Message-ID: A banking pin for the mask blank almost fell off and it was interfering with the wafer holder. I am glad the problem is fixed. Please ignore all previous posts. From vilanova at snf.stanford.edu Thu Mar 6 06:52:01 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mar 6, 2003 6:52:01 AM Subject: Problem karlsuss 2003-03-05 19:47:42: Report Clear for karlsuss Message-ID: Problem resolved by operator , mask pin was loose. From vilanova at snf.stanford.edu Thu Mar 6 06:54:27 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mar 6, 2003 6:54:27 AM Subject: Problem karlsuss 2003-03-05 20:00:54: Report Clear for karlsuss Message-ID: Focus problem due to a lose pin in the mask holder. the problem was resolved by the same user. ok to use now. From vilanova at snf.stanford.edu Thu Mar 6 06:55:13 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mar 6, 2003 6:55:13 AM Subject: Problem karlsuss 2003-03-05 20:22:35: Report Clear for karlsuss Message-ID: lose pin mask holder was found lose . Ok to use now. From marklee at snf.stanford.edu Wed Mar 19 04:37:40 2003 From: marklee at snf.stanford.edu (marklee at snf.stanford.edu) Date: Mar 19, 2003 4:37:40 PM Subject: Problem karlsuss 2003-03-19 16:37:38: Lamp Life/Power Failure Message-ID: From martinez at snf.stanford.edu Wed Mar 19 04:42:22 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mar 19, 2003 4:42:22 PM Subject: Problem karlsuss 2003-03-19 16:37:38: Report Clear for karlsuss Message-ID: reset system. ready for use From martinez at snf.stanford.edu Thu Mar 27 04:53:27 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mar 27, 2003 4:53:27 PM Subject: Shutdown karlsuss 2003-03-27 16:53:26: Report Shutdown for karlsuss Message-ID: conversion to DUV continues on fri From vilanova at snf.stanford.edu Mon Mar 31 11:25:06 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mar 31, 2003 11:25:06 AM Subject: Shutdown karlsuss 2003-03-27 16:53:26: Report Clear for karlsuss Message-ID: UV lamp Installation will continue later on the week due to a lamp issue . ok to use now .