Problem karlsuss 2003-03-05 19:47:42: focus problem

quickwin at snf.stanford.edu quickwin at snf.stanford.edu
Wed Mar 5 07:47:42 PST 2003


During front side alignment, right side mask and wafer do not appear sharp at the same time. Left side is OK. Eric P was with me when we saw this problem so it couldn't be operator error.




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