Problem karlsuss 2003-03-05 20:00:54: Focus problem 2

quickwin at snf.stanford.edu quickwin at snf.stanford.edu
Wed Mar 5 08:00:55 PST 2003


In addition to the previous problem I reported, the exposed wafer pattern looked very bad on the right side also. It seems to be a WEC problem. By the way, I used soft contact mode.




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