From vilanova at snf.stanford.edu Fri Apr 2 10:11:36 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 2 Apr 2004 10:11:36 -0800 Subject: Comment karlsuss 2004-03-18 10:29:11: system under deep uv mode Message-ID: system under deep UV mode from 4/2/04/ to 4/5/04 At 8:00 AM From vilanova at snf.stanford.edu Mon Apr 5 14:40:13 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 5 Apr 2004 14:40:13 -0700 Subject: Problem karlsuss 2004-03-31 23:09:15: severe backside misalignment ? Message-ID: cheked grab z position , checked backside alignment ,grab image, Ok tu se . From me342a at snf.stanford.edu Thu Apr 22 11:01:18 2004 From: me342a at snf.stanford.edu (me342a at snf.stanford.edu) Date: Thu, 22 Apr 2004 11:01:18 -0700 Subject: Problem karlsuss 2004-04-22 11:01:17: trouble with focusing left side Message-ID: when focusing wafer alignment on left side, mask moves From vilanova at snf.stanford.edu Thu Apr 22 13:43:47 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 22 Apr 2004 13:43:47 -0700 Subject: Problem karlsuss 2004-04-22 11:01:17: trouble with focusing left side Message-ID: Under deep UV mode, 'til tomorrow 4/23/04 at 3:00PM adjusted left side focus , ok to use. From vilanova at snf.stanford.edu Fri Apr 23 10:19:43 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 23 Apr 2004 10:19:43 -0700 Subject: Comment karlsuss 2004-04-23 10:19:42: Deep UV Message-ID: equipment will be under deep UV mode until MOnday morning 4/26/04 Sorry for the late notice From vilanova at snf.stanford.edu Mon Apr 26 07:33:25 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 26 Apr 2004 07:33:25 -0700 Subject: Comment karlsuss 2004-04-26 07:33:24: Lamp back tor normal MOde Message-ID: Lamp Back to normal MOde :-) ready to use.