From hanjun at snf.stanford.edu Fri Mar 5 12:45:59 2004 From: hanjun at snf.stanford.edu (hanjun at snf.stanford.edu) Date: Fri, 5 Mar 2004 12:45:59 -0800 Subject: Problem karlsuss 2004-03-05 12:45:58: mask vacuum is unstable Message-ID: Mask vacuum turns OFF by itself occassionally. Also, the mask holder loses vacuum after exposure is done. This may cause very dangerous situation to your mask. Be aware!! From vilanova at snf.stanford.edu Fri Mar 5 14:02:02 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 5 Mar 2004 14:02:02 -0800 Subject: Comment karlsuss 2004-01-30 10:24:07: 365nm Message-ID: comment cleared From vilanova at snf.stanford.edu Fri Mar 5 14:02:19 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 5 Mar 2004 14:02:19 -0800 Subject: Comment karlsuss 2004-02-05 10:30:23: deep uv Message-ID: cleared From vilanova at snf.stanford.edu Fri Mar 5 14:02:29 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 5 Mar 2004 14:02:29 -0800 Subject: Comment karlsuss 2004-02-06 15:00:05: lamp change Message-ID: cleared From vilanova at snf.stanford.edu Fri Mar 5 14:02:39 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 5 Mar 2004 14:02:39 -0800 Subject: Comment karlsuss 2004-02-20 10:27:23: BACK TO NORMAL MODE Message-ID: cleared From vilanova at snf.stanford.edu Fri Mar 5 14:02:50 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 5 Mar 2004 14:02:50 -0800 Subject: Comment karlsuss 2004-02-27 14:34:27: under deep uv mode Message-ID: cleared From vilanova at snf.stanford.edu Fri Mar 5 14:05:20 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 5 Mar 2004 14:05:20 -0800 Subject: Problem karlsuss 2004-03-05 12:45:58: mask vacuum is unstable Message-ID: system wil be under deep UV mode from 1PM friday through Monday Morning 9AM 3/8/04 , checked mask vacuum , tested, ok to use . From vilanova at snf.stanford.edu Mon Mar 8 09:54:27 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 8 Mar 2004 09:54:27 -0800 Subject: Comment karlsuss 2004-03-08 09:54:26: back to normal mode :-) Message-ID: From vilanova at snf.stanford.edu Thu Mar 11 10:01:19 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 11 Mar 2004 10:01:19 -0800 Subject: Comment karlsuss 2004-03-11 10:01:19: under deep UV Message-ID: System Under Deep UV 'til tomorrow 3/12/04 10:00AM :-) From parco at snf.stanford.edu Thu Mar 11 17:22:26 2004 From: parco at snf.stanford.edu (parco at snf.stanford.edu) Date: Thu, 11 Mar 2004 17:22:26 -0800 Subject: Problem karlsuss 2004-03-11 17:22:26: stage difficult to move back in position Message-ID: stage difficult to move back in position; spring from create problem From vilanova at snf.stanford.edu Fri Mar 12 07:46:28 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 12 Mar 2004 07:46:28 -0800 Subject: Problem karlsuss 2004-03-11 17:22:26: stage difficult to move back in position Message-ID: Stage Spring Adjusted , ok to use. :-) From vilanova at snf.stanford.edu Fri Mar 12 08:16:51 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 12 Mar 2004 08:16:51 -0800 Subject: Comment karlsuss 2004-03-08 09:54:26: back to normal mode :-) Message-ID: comment cleared From vilanova at snf.stanford.edu Fri Mar 12 08:17:03 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 12 Mar 2004 08:17:03 -0800 Subject: Comment karlsuss 2004-03-11 10:01:19: under deep UV Message-ID: comment cleared From vilanova at snf.stanford.edu Fri Mar 12 08:18:00 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 12 Mar 2004 08:18:00 -0800 Subject: Comment karlsuss 2004-03-12 08:18:00: back to normal MOde :-) Message-ID: Back to normal Mode 365 Nm From vilanova at snf.stanford.edu Thu Mar 18 10:28:10 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 18 Mar 2004 10:28:10 -0800 Subject: Comment karlsuss 2004-03-12 08:18:00: back to normal MOde :-) Message-ID: comment cleared . From vilanova at snf.stanford.edu Thu Mar 18 10:29:12 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 18 Mar 2004 10:29:12 -0800 Subject: Comment karlsuss 2004-03-18 10:29:11: system under deep uv mode Message-ID: system under deep UV mode until tomorrow 3/19/03 10:00AM :-) From zappe at snf.stanford.edu Wed Mar 31 23:09:15 2004 From: zappe at snf.stanford.edu (zappe at snf.stanford.edu) Date: Wed, 31 Mar 2004 23:09:15 -0800 Subject: Problem karlsuss 2004-03-31 23:09:15: severe backside misalignment ? Message-ID: I experienced with two different wafers and masks a sideward misalignment in a backside alignment procedure (misalignment of 20 microns or more). Program was 'soft contact'. I didn't switch from alignment distance to contact prior to exposure, but normally that's fine. Not sure what the cause is, other user might want to check if the same happens to them.