Problem karlsuss 2004-03-31 23:09:15: severe backside misalignment ?

zappe at snf.stanford.edu zappe at snf.stanford.edu
Wed Mar 31 23:09:15 PST 2004


I experienced with two different wafers and masks a sideward misalignment in a backside alignment procedure (misalignment of 20 microns or more). 
Program was 'soft contact'. I didn't switch from alignment distance to contact prior to exposure, but normally that's fine.
Not sure what the cause is, other user might want to check if the same happens to them.




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