From haniff at snf.stanford.edu Wed Feb 2 17:34:34 2005 From: haniff at snf.stanford.edu (haniff at snf.stanford.edu) Date: Wed, 2 Feb 2005 17:34:34 -0800 Subject: Problem karlsuss SNF 2005-02-02 17:34:33: Image grab Message-ID: Focus lost on right side after "image grab" From vilanova at snf.stanford.edu Thu Feb 3 10:13:02 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 3 Feb 2005 10:13:02 -0800 Subject: Problem karlsuss SNF 2005-02-02 17:34:33: Image grab Message-ID: tested grab image and I could not repeat the problem, ok to use ( haniff come back bring your wafers to help you ) From vilanova at snf.stanford.edu Fri Feb 4 13:53:56 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 4 Feb 2005 13:53:56 -0800 Subject: Comment karlsuss SNF 2005-02-04 13:53:56: back to normal mode Message-ID: back to normal mode 365Nm ready to use. From vilanova at snf.stanford.edu Thu Feb 10 08:02:45 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 10 Feb 2005 08:02:45 -0800 Subject: Comment karlsuss SNF 2005-02-10 08:02:44: System Under Deep UV Mode Message-ID: System Under Deep UV Mode. From vilanova at snf.stanford.edu Thu Feb 10 15:01:46 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 10 Feb 2005 15:01:46 -0800 Subject: Comment karlsuss SNF 2005-02-10 15:01:42: System back to normal mode 365Nm Message-ID: The Deep UV guys Finished a little early today,system back to normal mode 365Nm New lamp Intensity 15.0 Uniformity 1.72% Ready to use. From vilanova at snf.stanford.edu Thu Feb 17 09:46:24 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 17 Feb 2005 09:46:24 -0800 Subject: Comment karlsuss SNF 2005-02-17 09:45:42: system under deep UV mode Message-ID: System Under Deep UV mode until Tomorrow at 14:00 hrs. From vilanova at snf.stanford.edu Fri Feb 18 13:46:26 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 18 Feb 2005 13:46:26 -0800 Subject: Comment karlsuss SNF 2004-12-02 10:10:46: System Under Deep UV Message-ID: cleared comment. From vilanova at snf.stanford.edu Fri Feb 18 13:46:43 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 18 Feb 2005 13:46:43 -0800 Subject: Comment karlsuss SNF 2004-12-09 14:48:07: System Under normal mode Message-ID: cleared comment. From vilanova at snf.stanford.edu Fri Feb 18 13:46:59 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 18 Feb 2005 13:46:59 -0800 Subject: Comment karlsuss SNF 2004-12-15 07:39:21: Deep UV Mode Message-ID: clreared comment From vilanova at snf.stanford.edu Fri Feb 18 13:47:13 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 18 Feb 2005 13:47:13 -0800 Subject: Comment karlsuss SNF 2004-12-16 14:32:13: system back under normal mode Message-ID: cleared comment From vilanova at snf.stanford.edu Fri Feb 18 13:47:26 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 18 Feb 2005 13:47:26 -0800 Subject: Comment karlsuss SNF 2005-01-06 08:06:16: System Under Deep UV Mode Message-ID: cleared comment. From vilanova at snf.stanford.edu Fri Feb 18 13:47:37 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 18 Feb 2005 13:47:37 -0800 Subject: Comment karlsuss SNF 2005-01-07 14:20:20: system back to normal mode Message-ID: cleared comment. From vilanova at snf.stanford.edu Fri Feb 18 13:47:44 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 18 Feb 2005 13:47:44 -0800 Subject: Comment karlsuss SNF 2005-01-21 14:04:28: back to normal mode 365 Nm Message-ID: cleared comment From vilanova at snf.stanford.edu Fri Feb 18 13:47:53 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 18 Feb 2005 13:47:53 -0800 Subject: Comment karlsuss SNF 2005-01-23 15:58:10: BSA won't move sideways Message-ID: cleared comment. From vilanova at snf.stanford.edu Fri Feb 18 13:48:06 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 18 Feb 2005 13:48:06 -0800 Subject: Comment karlsuss SNF 2005-01-28 13:45:25: Back to normal mode Message-ID: cleared comment. From vilanova at snf.stanford.edu Fri Feb 18 13:49:03 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 18 Feb 2005 13:49:03 -0800 Subject: Comment karlsuss SNF 2005-02-18 13:49:02: system back to normal mode 365Nm Message-ID: System back to normal mode 365 Nm Uniformity = 2.0 % Intensity = 15.0 From vilanova at snf.stanford.edu Fri Feb 18 13:49:16 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 18 Feb 2005 13:49:16 -0800 Subject: Comment karlsuss SNF 2005-02-04 13:53:56: back to normal mode Message-ID: cleared comment. From vilanova at snf.stanford.edu Fri Feb 18 13:49:25 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 18 Feb 2005 13:49:25 -0800 Subject: Comment karlsuss SNF 2005-02-10 08:02:44: System Under Deep UV Mode Message-ID: cleared comment. From vilanova at snf.stanford.edu Fri Feb 18 13:49:36 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 18 Feb 2005 13:49:36 -0800 Subject: Comment karlsuss SNF 2005-02-10 15:01:42: System back to normal mode 365Nm Message-ID: cleared comment . From vilanova at snf.stanford.edu Fri Feb 18 13:49:45 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 18 Feb 2005 13:49:45 -0800 Subject: Comment karlsuss SNF 2005-02-17 09:45:42: system under deep UV mode Message-ID: cleared comment. From sdogbe at snf.stanford.edu Sat Feb 19 23:40:35 2005 From: sdogbe at snf.stanford.edu (sdogbe at snf.stanford.edu) Date: Sat, 19 Feb 2005 23:40:35 -0800 Subject: Problem karlsuss SNF 2005-02-19 23:40:34: Problem Message-ID: System software not responding. From parco at snf.stanford.edu Tue Feb 22 07:59:45 2005 From: parco at snf.stanford.edu (parco at snf.stanford.edu) Date: Tue, 22 Feb 2005 07:59:45 -0800 Subject: Shutdown karlsuss SNF 2005-02-22 07:59:44: Message-ID: From vilanova at snf.stanford.edu Tue Feb 22 08:25:05 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 22 Feb 2005 08:25:05 -0800 Subject: Comment karlsuss SNF 2005-02-18 13:49:02: system back to normal mode 365Nm Message-ID: Found lamp housing & microscope out of position, adjusted them , loaded mask , exposed wafer, ok to use. From vilanova at snf.stanford.edu Tue Feb 22 08:25:45 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 22 Feb 2005 08:25:45 -0800 Subject: Shutdown karlsuss SNF 2005-02-22 07:59:44: Message-ID: Found lamp housing and microscopes out of position adjusted lamp housing and microscopes, exposed wafer ready to use. From vilanova at snf.stanford.edu Tue Feb 22 08:26:07 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 22 Feb 2005 08:26:07 -0800 Subject: Problem karlsuss SNF 2005-02-19 23:40:34: Problem Message-ID: read previous messages . From alirezaa at snf.stanford.edu Wed Feb 23 03:07:59 2005 From: alirezaa at snf.stanford.edu (alirezaa at snf.stanford.edu) Date: Wed, 23 Feb 2005 03:07:59 -0800 Subject: Problem karlsuss SNF 2005-02-23 03:07:59: software does not respond Message-ID: From vilanova at snf.stanford.edu Wed Feb 23 07:17:34 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 23 Feb 2005 07:17:34 -0800 Subject: Problem karlsuss SNF 2005-02-23 03:07:59: software does not respond Message-ID: I reset the system , tested , ok to use . From vilanova at snf.stanford.edu Fri Feb 25 09:18:27 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 25 Feb 2005 09:18:27 -0800 Subject: Comment karlsuss SNF 2005-02-25 09:18:26: system back to normal mode 365Nm Message-ID: system i sback to normal mode 365Nm , deep UV guys completed their work early today, Ready to use.