From vilanova at snf.stanford.edu Fri Jul 1 14:28:32 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 1 Jul 2005 14:28:32 -0700 Subject: Comment karlsuss SNF 2005-07-01 14:28:31: back to normal mode 365Nm Message-ID: System back to normal mode 365Nm Lamp Calibrated . ready to use. From vilanova at snf.stanford.edu Thu Jul 7 09:58:20 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 7 Jul 2005 09:58:20 -0700 Subject: Comment karlsuss SNF 2005-07-07 09:58:19: Deep UV Mode Message-ID: System Under deep UV mode until tomorrow afternoon 7/8/05 From vilanova at snf.stanford.edu Fri Jul 8 10:52:48 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 8 Jul 2005 10:52:48 -0700 Subject: Comment karlsuss SNF 2005-07-08 10:52:47: System back to normal mode 365 Nm /Cm2 Message-ID: System back to normal mode 365Nm/Cm2 Lamp Calibrated ready to use. From vilanova at snf.stanford.edu Fri Jul 8 11:15:19 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 8 Jul 2005 11:15:19 -0700 Subject: Comment karlsuss SNF 2005-06-30 09:39:23: System Under deep UV MOde Message-ID: comment cleared. From vilanova at snf.stanford.edu Fri Jul 8 11:15:32 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 8 Jul 2005 11:15:32 -0700 Subject: Comment karlsuss SNF 2005-07-01 14:28:31: back to normal mode 365Nm Message-ID: comment cleared. From vilanova at snf.stanford.edu Fri Jul 8 11:15:44 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 8 Jul 2005 11:15:44 -0700 Subject: Comment karlsuss SNF 2005-07-07 09:58:19: Deep UV Mode Message-ID: comment cleared. From vilanova at snf.stanford.edu Fri Jul 8 11:15:57 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 8 Jul 2005 11:15:57 -0700 Subject: Comment karlsuss SNF 2005-07-08 10:52:47: System back to normal mode 365 Nm /Cm2 Message-ID: comment cleared. From vilanova at snf.stanford.edu Thu Jul 14 10:02:01 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 14 Jul 2005 10:02:01 -0700 Subject: Comment karlsuss SNF 2005-07-14 10:02:00: NO Deep UV Today Message-ID: NO deep UV today , Sorry for the late notice, System under NOrmal mode, ready to use. From crichter at snf.stanford.edu Sun Jul 17 13:57:40 2005 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Sun, 17 Jul 2005 13:57:40 -0700 Subject: Problem karlsuss SNF 2005-07-17 13:57:39: Backside Aignment optics not moving in x direction Message-ID: I also can't select neither the RIGHT or LEFT buttons to move the optics one at a time. From vilanova at snf.stanford.edu Mon Jul 18 07:54:07 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 18 Jul 2005 07:54:07 -0700 Subject: Problem karlsuss SNF 2005-07-17 13:57:39: Backside Aignment optics not moving in x direction Message-ID: UserS moved the micrometer to far away and got the Bottom microscopes stuck , Adjusted bottom microscospes , tested ready to use. From vilanova at snf.stanford.edu Thu Jul 21 10:26:06 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 21 Jul 2005 10:26:06 -0700 Subject: Comment karlsuss SNF 2005-07-21 10:26:06: System under deep UV mode until tomorrow Message-ID: System Under deep UV mode until tomorrow afternoon 7/22/05 From vilanova at snf.stanford.edu Fri Jul 22 14:32:10 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 22 Jul 2005 14:32:10 -0700 Subject: Comment karlsuss SNF 2005-07-14 10:02:00: NO Deep UV Today Message-ID: Cleared Comment From vilanova at snf.stanford.edu Fri Jul 22 14:32:27 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 22 Jul 2005 14:32:27 -0700 Subject: Comment karlsuss SNF 2005-07-21 10:26:06: System under deep UV mode until tomorrow Message-ID: Cleared comment. From vilanova at snf.stanford.edu Fri Jul 22 14:33:04 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 22 Jul 2005 14:33:04 -0700 Subject: Comment karlsuss SNF 2005-07-22 14:33:03: System Back to normal Mode. Message-ID: System back to normal mode 365Nm Lamp Calibrated, ready to use. From crichter at snf.stanford.edu Sat Jul 23 15:45:03 2005 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Sat, 23 Jul 2005 15:45:03 -0700 Subject: Problem karlsuss SNF 2005-07-23 15:45:03: Backside Optics cannot focus to get targets to look clear and focused Message-ID: This aligner was my last resort to get aligned wafers after 3 unsucessful attempts using the other two mask aligners. Unfortunately, the misalignment happened on this machine as well. I only had one wafer that was aligned correctly. I can't seem to get the left and right optics to focus well. The alignment targets are still fuzzy looking when I see them on the monitor, especially when I grab the image. Its very difficult to see the edges of the squares and crosshairs. When I get my wafer targets to line up with the mask , I can't tell if the alignment is good because the grabbed image is blurry . After developing these wafers, the exposed pattern was way off from the pattern on the wafer (50-100um). The karl Suss #2 aligner seems to have one of the optics (left side) working well with focusing my targets. I can clearly see the edges of the crosshairs and squares. The right side objective cannot produce the same focusing quality as the left objective. My targets are large, they take up about a third or half of the monitor area. I should be able to see the edges well. I think I reported misalignment problems with this aligner last week. Are the adjustment/focus knobs and backside optics working now? I'm on a hard deadline for this month and really can't spend more than two days on the same wafers. I've had to strip these down and re-apply resist 3 times now and going on the 4th time now. What can be done to remedy these ongoing misalignment issues? From uli at snf.stanford.edu Tue Jul 26 11:56:15 2005 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 26 Jul 2005 11:56:15 -0700 Subject: Comment karlsuss SNF 2005-07-26 11:56:14: Message-ID: From uli at snf.stanford.edu Tue Jul 26 11:56:33 2005 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 26 Jul 2005 11:56:33 -0700 Subject: Comment karlsuss SNF 2005-07-26 11:56:14: Message-ID: From martinez at snf.stanford.edu Wed Jul 27 10:08:07 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Wed, 27 Jul 2005 10:08:07 -0700 Subject: Problem karlsuss SNF 2005-07-23 15:45:03: Backside Optics cannot focus to get targets to look clear and focused Message-ID: loaded resolution mask, checked bsa focus/high mag. features down to 3.0um are in both microscopes. no problem found From vilanova at snf.stanford.edu Thu Jul 28 09:34:35 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 28 Jul 2005 09:34:35 -0700 Subject: Comment karlsuss SNF 2005-07-28 09:34:34: Lamp Under Deep UV Mode Message-ID: Lamp Unde Deep UV mode until tomorrow 7/29/05 Afternoon. From vilanova at snf.stanford.edu Thu Jul 28 09:35:15 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 28 Jul 2005 09:35:15 -0700 Subject: Comment karlsuss SNF 2005-07-22 14:33:03: System Back to normal Mode. Message-ID: Cleared Comment. From vilanova at snf.stanford.edu Fri Jul 29 14:18:39 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 29 Jul 2005 14:18:39 -0700 Subject: Comment karlsuss SNF 2005-07-29 14:18:39: Back to normal mode Message-ID: System back to normal mode, lamp calibrated ready to use. From mcintoda at snf.stanford.edu Sun Jul 31 15:22:25 2005 From: mcintoda at snf.stanford.edu (mcintoda at snf.stanford.edu) Date: Sun, 31 Jul 2005 15:22:25 -0700 Subject: Problem karlsuss SNF 2005-07-31 15:22:24: Freeze Up Message-ID: System would not respond to 'load' or 'change mask' when mask was loaded. Broke mask vaccum and dropped mask unto chuck.