Problem karlsuss SNF 2005-06-23 08:24:43: substrate chuck tray won't come out all the way

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Thu Jun 23 08:24:44 PDT 2005


vacuum hose behind chuck is hung up on something as it is pulled tight when chuck tray is about 1/3 of the way out.




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