From vilanova at snf.stanford.edu Thu Mar 3 09:48:54 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 3 Mar 2005 09:48:54 -0800 Subject: Comment karlsuss SNF 2005-02-25 09:18:26: system back to normal mode 365Nm Message-ID: cleared comment. From vilanova at snf.stanford.edu Thu Mar 3 09:49:30 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 3 Mar 2005 09:49:30 -0800 Subject: Comment karlsuss SNF 2005-03-03 09:49:27: SYSTEM UNDER DEEP UV MODE Message-ID: SYSTEM UNDER DEEP UV MODE, UNTIL TOMORROW AFTERNOON 3/4/05 . From vilanova at snf.stanford.edu Fri Mar 4 14:14:21 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 4 Mar 2005 14:14:21 -0800 Subject: Comment karlsuss SNF 2005-03-04 14:14:20: System back to normal mode 365Nm Message-ID: System back to normal mode 365 Nm , ready to use. From ianchan at snf.stanford.edu Mon Mar 7 13:05:00 2005 From: ianchan at snf.stanford.edu (ianchan at snf.stanford.edu) Date: Mon, 7 Mar 2005 13:05:00 -0800 Subject: Problem karlsuss SNF 2005-03-07 13:05:00: please wait Message-ID: software stuck on please wait. Microscope not moving up From vilanova at snf.stanford.edu Mon Mar 7 13:14:40 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 7 Mar 2005 13:14:40 -0800 Subject: Problem karlsuss SNF 2005-03-07 13:05:00: please wait Message-ID: Initialized system , initialized microscope, tested a few times ok to use. From vilanova at snf.stanford.edu Fri Mar 11 13:33:32 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Mar 2005 13:33:32 -0800 Subject: Comment karlsuss SNF 2005-03-11 13:33:32: Back to normal mode 365 Nm Message-ID: Back to normal mode 365Nm , ready to use. From kone at snf.stanford.edu Tue Mar 15 21:41:28 2005 From: kone at snf.stanford.edu (kone at snf.stanford.edu) Date: Tue, 15 Mar 2005 21:41:28 -0800 Subject: Problem karlsuss SNF 2005-03-15 21:41:27: Machine restarted and stalled Message-ID: While trying to align a wafer, we noticed that the wafer chuck rotation was out of limits, so we decided to unload the wafer, rethread the rotation adjustment, and start over again. The machine wouldn't allow us to unload (we pressed unload 2x without effect) and on the 3rd press, the machine looks like it restarted itself. But it seems stuck...."Please wait" message.... The machine was in alignment mode, not in contact when the problem occurred. From vilanova at snf.stanford.edu Wed Mar 16 06:59:35 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 16 Mar 2005 06:59:35 -0800 Subject: Problem karlsuss SNF 2005-03-15 21:41:27: Machine restarted and stalled Message-ID: initialized system , microscopes,exposure system , tested ok to use. From vilanova at snf.stanford.edu Fri Mar 18 13:38:08 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 18 Mar 2005 13:38:08 -0800 Subject: Comment karlsuss SNF 2005-03-18 13:38:07: System Back to normal mode Message-ID: System Back to normal mode 365Nm. ok to use. From vilanova at snf.stanford.edu Fri Mar 25 12:26:16 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 25 Mar 2005 12:26:16 -0800 Subject: Comment karlsuss SNF 2005-03-25 12:26:15: System back to normal mode 365Nm Message-ID: System Back to normal mode 365Nm, ready to use. From yeh at snf.stanford.edu Mon Mar 28 18:13:11 2005 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Mon, 28 Mar 2005 18:13:11 -0800 Subject: Problem karlsuss SNF 2005-03-28 18:13:10: inconsistent exposure result Message-ID: trying to resolve 4.5um/1.5um linespace but out of 10 identical wafers, 3 wafers have unresolved linespace. could be an inconsistent WEC problem. From martinez at snf.stanford.edu Tue Mar 29 11:11:12 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Tue, 29 Mar 2005 11:11:12 -0800 Subject: Problem karlsuss SNF 2005-03-28 18:13:10: inconsistent exposure result Message-ID: cleaned ellipsoidal mirror calibrated lamp, set up grab z cycled 3 resolution wafers exposure is good at 1.0um across the wafer From yeh at snf.stanford.edu Tue Mar 29 20:11:20 2005 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Tue, 29 Mar 2005 20:11:20 -0800 Subject: Comment karlsuss SNF 2005-03-29 20:11:19: possible WEC problem? Message-ID: couldn't focus on both mask and wafer while in contact. seems worse for left microscope. 2um features did not resolve as a result.