Problem karlsuss SNF 2005-03-28 18:13:10: inconsistent exposure result

yeh at snf.stanford.edu yeh at snf.stanford.edu
Mon Mar 28 18:13:11 PST 2005


trying to resolve 4.5um/1.5um linespace but out of 10 identical wafers, 3 wafers have unresolved linespace.  could be an inconsistent WEC problem.




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